Author Affiliations
Abstract
1 School of Electronic Science and Engineering, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210023, China
2 School of Electronic and Information Engineering, Nanjing University of Information Science & Technology Binjiang College, Wuxi 214105, China
Understanding detailed avalanche mechanisms is critical for design optimization of avalanche photodiodes (APDs). In this work, avalanche characteristics and single photon counting performance of 4H-SiC n-i-p and p-i-n APDs are compared. By studying the evolution of breakdown voltage as a function of incident light wavelength, it is confirmed that at the deep ultraviolet (UV) wavelength region the avalanche events in 4H-SiC n-i-p APDs are mainly induced by hole-initiated ionization, while electron-initiated ionization is the main cause of avalanche breakdown in 4H-SiC p-i-n APDs. Meanwhile, at the same dark count rate, the single photon counting efficiency of n-i-p APDs is considerably higher than that of p-i-n APDs. The higher performance of n-i-p APDs can be explained by the larger impact ionization coefficient of holes in 4H-SiC. In addition, this is the first time, to the best of our knowledge, to report single photon detection performance of vertical 4H-SiC n-i-p-n APDs.
4H-SiC avalanche photodiode electron-initiated ionization hole-initiated ionization 
Chinese Optics Letters
2021, 19(9): 092501

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