To solve the misaligned grating problem in the double-pass single-parallel two-grating compressor system, a monitoring system with simple structure is designed. Numerical simulation is investigated based on the system scheme and an original method for online adjusting gratings is proposed. All dimensions of two misaligned gratings are analyzed and then separated to adjust step by step based on the relationship between monitoring variables and misadjustment until the misaligned gratings in the vacuum chamber have been adjusted back to the ideal position. The alignment error and reliability discussion of the method are presented. Based on the existed parameters of the system, the accuracy range from 0.30 μrad to 2.78 μrad is obtained.

为了解决双通单平行光栅对压缩器构型里光栅失调问题，设计了一套结构简单的监测系统方案，根据系统结构进行数值模拟，通过模拟分析提出了一种新的光栅在线调节方法。考虑两块光栅不同维度的失调量，结合模拟得出监测量与失调量的关系，根据监测量变化将失调量一一分离调节，最后将真空室中的失调光栅调回理想位置。对该方法进行了误差和可行性分析，根据压缩器构型参数，得到调节精度范围为0.30~2.78 μrad。