1 安徽建筑大学 电子与信息工程学院，安徽合肥23060
2 合肥工业大学 仪器科学与光电工程学院，安徽合肥30009
原子力显微镜处于轻敲模式工作于大气环境时，由于悬臂和被测试样间的距离很小，悬臂的振动会产生相应的压膜阻尼，影响悬臂的动态特性。基于欧拉-伯努利梁方程对悬臂梁进行建模，结合雷诺方程建立悬臂阻尼作用的分析模型，研究悬臂压膜阻尼效应的主要影响因素，分析不同谐振模态下压膜阻尼效应对悬臂阻尼系数、动态原子力显微镜的测量特性的影响，并基于多模态原子力显微镜进行了实验和测试。理论及实验结果表明，空气压膜阻尼对于基础谐振模态原子力显微镜的测量特性有一定的影响，在悬臂试样20~2 μm逼近过程中，悬臂品质因数明显降低，两种悬臂振幅分别减少了7.8%和20.6%，悬臂宽度增大则受到的压膜阻尼影响也增加；相同实验条件下，二阶谐振模态下的悬臂品质因数和振幅均没有明显变化。在基础谐振模态下压膜阻尼效应会引起微悬臂品质因数的降低，从而导致原子力显微镜测量分辨率的减小和测量速度的降低；多模态原子力显微镜的高阶谐振模态可显著降低空气压膜阻尼效应对悬臂品质因数及测量特性的影响。
原子力显微镜 压膜阻尼 品质因数 高阶谐振 atomic force microscopy squeeze film damping quality factor higher-order resonant 光学 精密工程
2022, 30(19): 2362
光学 精密工程
2021, 29(10): 2375
Author Affiliations
Abstract
1 State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University,Changsha 410082, China
2 State Key Lab of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics andAstronautics, Nanjing 210016, China
3 Department of Mechanical Engineering, Tokyo Institute of Technology, Japan
4 Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang,621000, China
The importance to industry of non-contact bearings is growing rapidly as the demand for highspeed and high-precision manufacturing equipment increases. As a recently developed non-contact technology, near-field acoustic levitation (NFAL) has drawn much attention for the advantages it offers, including no requirement for an external pressurized air supply, its compact structure, and its ability to adapt to its environment. In this paper, the working mechanism of NFAL is introduced in detail and compared to all existing non-contact technologies to demonstrate its versatility and potential for practical applications in industry. The fundamental theory of NFAL, including gas film lubrication theory and acoustic radiation pressure theory is presented. Then, the current stateof- the-art of the design and development of squeeze film air bearings based on NFAL is reviewed. Finally, future trends and obstacles to more widespread use are discussed.
acoustic levitation non-contact technology bearing measuring and manufacturing equipment squeeze film International Journal of Extreme Manufacturing
2019, 1(3): 032002
