The silicon-based arrayed waveguide grating (AWG) is widely used due to its compact footprint and its compatibility with the mature CMOS process. However, except for AWGs with ridged waveguides of a few micrometers of cross section, any small process error will cause a large phase deviation in other AWGs, resulting in an increasing cross talk. In this paper, an ultralow cross talk AWG via a tunable microring resonator (MRR) filter is demonstrated on the SOI platform. The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and -45.1 dB, respectively. Compared with conventional AWG, its cross talk is greatly reduced.

提出并实验研究了一种基于铌酸锂薄膜光波导的电光调谐的光栅辅助定向耦合器。该耦合器由单模与双模脊形波导及制作于双模波导侧壁的长周期光栅构成。长周期光栅的引入补偿了单模与双模波导中基模的相位失配，可在共振波长实现两波导中基模的高效耦合。进一步地，在双模脊形波导两侧制作调谐电极实现了高速、低驱动电压的电光调谐功能。优化了器件的制作工艺，并采用单次干法刻蚀将耦合器的光栅与波导同步制作于X切铌酸锂薄膜上。测试结果表明所制作的器件在1 595.3 nm波长处实现了14.8 dB的隔离度，其电光调谐效率为0.38 nm/V（1 595.3 nm~1 599.0 nm），热光调谐效率为0.14 nm/℃（25 ℃~50 ℃）。该器件可用于实现可调谐滤波、滤模、电光调制及高灵敏度温度传感等功能。

A silicon-based digitally tunable positive/negative dispersion controller (DC) is proposed and realized for the first time using the cascaded bidirectional chirped multimode waveguide gratings (CMWGs), achieving positive and negative dispersion by switching the light propagation direction. A 1 × 2 Mach–Zehnder switch (MZS) and a 2 × 1 MZS are placed before and after to route the light path for realizing positive/negative switching. The device has Q stages of identical bidirectional CMWGs with a binary sequence. Thus the digital tuning is convenient and scalable, and the total dispersion accumulated by all the stages can be tuned digitally from - ( 2^Q - 1 ) D₀ to ( 2^Q - 1 ) D₀ with a step of D₀ by controlling the switching states of all 2 × 2 MZSs, where D₀ is the dispersion provided by a single bidirectional CMWG unit. Finally, a digitally tunable positive/negative DC with Q = 4 is designed and fabricated. These CMWGs are designed with a 4-mm-long grating section, enabling the dispersion D₀ of about 4.16 ps / nm in a 20-nm-wide bandwidth. The dispersion is tuned from -61.53 to 63.77 ps / nm by switching all MZSs appropriately, and the corresponding group delay is varied from -1021 to 1037 ps.

基于低损耗氮化硅光波导平台，采用一个1×6阵列波导光栅（AWG）与六个仅中心波长不同的1×25AWG两级级联的架构，优化设计了集成光谱分析芯片。仿真结果表明，该光谱分析芯片的工作带宽、波长分辨率、最小通道插损分别为75 nm、0.5 nm和4.9 dB，且通道间最小相邻、非相邻串扰约为-27.7 dB、-23.0 dB，最大相邻、非相邻串扰约为-22.6 dB、-12.5 dB。