Author Affiliations
Abstract
Faculty of Mechanical and Electronic Engineering, Southwest Petroleum University, Key Laboratory of Petroleum-Gas Equipment, Ministry of Education of China, Chengdu 610500
A novel three-component hybrid-integrated optical accelerometer based on LiNbO3 photoelastic waveguide is presented. The photoelasitcity of LiNbO3 due to three-dimensional stress states is obtained analytically. We analyze the level of sensitivity to cross-axis accelerations which is a very important parameter for three-component accelerometer. Theoretically, the designed three-component hybrid-integrated optical accelerometer has a transverse sensitivity ratio (TSR) of zero. The sensor has a high natural frequency of 3.5 kHz and a linear broad working frequency.
三分量加速度传感器 光弹效应 横向灵敏度比 LiNbO3波导 130.6010 Sensors 280.4788 Optical sensing and sensors Chinese Optics Letters
2009, 7(1): 0132
天津大学精密仪器与光电子工程学院,光电信息技术科学教育部重点实验室,天津,300072
三分量光弹波导M-Z干涉型集成加速度传感器的研究,为高频高精度地震勘探提供集成化的高精度传感器.利用光弹原理,分析了光弹效应检测任意方向加速度的原理.在X切Y传LiNbO3晶体上,设计制作了光波导双M-Z干涉仪及各集成器件:波导相位调制器、波导偏振器.三分量光弹波导M-Z干涉型集成加速度传感器测试表明:该传感器动态范围宽、线性性好.主要参数为:相位灵敏度达1.81×10-4Rad/m·s-2;工作频带3～1506(Hz).
混合集成 三分量加速度传感器 光弹波导 马赫-曾德干涉 Hybrid-integrated Three-component accelerometer Photoelastic waveguide Mach-Zehnder interference
