Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
3 Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800
A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60*60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.
半导体干涉测量仪 正弦相位调制 表面形貌 实时测量 鉴相 120.3180 Interferometry 220.4840 Testing 230.5750 Resonators Chinese Optics Letters
2007, 5(3): 164
