Influence of charge coupled device (CCD)′ s nonlinear response characteristics on the near-field and far-field beam quality′ s measurement of high power laser system is analyzed. A new calibration method, based on single slit diffraction, is presented to calibrate CCD′ s photoelectric characteristics. Accomplish the calibration of a given CCD and restore the grey level of near-field and far-field energy distribution by the calibration curve in ideal and practical system to observe the influence on the measurement of near-field fill factor (FF) and far-field encircled energy distribution. The restoration shows that in a certain laser system the near-field FF will improve 1% ~2% after the grey level restoration. And it has nearly no influence on the farfield energy distribution parameters.

对利用电荷耦合器件(CCD)测量高能激光系统近远场能量分布时，CCD 光电响应非线性特性对光束质量评价的影响进行分析计算。提出了一种基于单缝衍射的CCD 光电响应标定方法，完成对某CCD 的标定工作。利用该标定结果分别对理论模拟及实际系统下的近远场能量分布进行灰度修复，考察灰度修复对近场填充因子(FF)及远场环围能量分布的影响。对实际光束的修复结果表明，经过灰度修复的近场填充因子会提高1 %~2 %，对远场评价基本无影响。