飞秒激光加工是一种冷加工技术，能克服热效应的影响，使加工材料的边缘非常整齐和精确，对高熔点和硬脆材料的微细加工具有显著优势。为制备一种由金属靶和金刚石构成的X射线源微结构阵列阳极，提出采用飞秒激光加工技术加工金刚石微结构阵列，通过实验研究了飞秒脉冲激光加工多晶金刚石材料的工艺参量，重点分析了激光聚焦物镜、激光脉冲能量、重复扫描次数对金刚石微结构形貌和尺寸的影响，得到了符合制作要求的加工参量，并依据加工参量制作出了槽宽为20 μm，槽深达45 μm的高质量多晶金刚石微结构阵列，测得其表面可承受电子束轰击的最大功率密度为12 W/mm2。该阵列将可用于制备微阵列阳极X射线源，为实现X射线大视场相衬成像提供关键的光源器件。

Femtosecond laser micromachining is a kind of cold working technology, which can overcome the influence of thermal effect. The advantage of this technology in micromachining of the hard brittle materials with high melting point is very obvious, because the edges of the processed materials are very neat and precise. A processing technique of polycrystalline diamond micro-structure by femtosecond laser is proposed to fabricate an X-ray source micro-structure array anode, which consists of metallic target and polycrystalline diamond. The micromachining parameters of polycrystalline diamond by femtosecond laser were studied experimentally. The effect of laser pulse energy, focus objective and scanning number on the morphology and dimension of ablated area was analyzed in detail. Finally, high quality polycrystalline diamond micro-structure arrays with a width of 20 μm and a depth of 45 μm were fabricated by femtosecond laser, and the maximum power density of permissable electron beam on its surface is 12 W/mm2. The polycrystalline diamond micro-structure array can be used for X-ray source with a micro-structure array anode, and can be utilized in X-ray phase contrast imaging for large field of view.