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飞秒激光跟踪仪跟踪光路的优化设计与分析

Optimal Design and Analysis of Tracking Optical Paths in Femtosecond Laser Tracker

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摘要

基于光学系统对跟踪探测的影响, 结合仪器功能, 提出了一种基于胶合透镜减小跟踪偏移量的方法, 实现了对飞秒激光跟踪仪跟踪光路的优化; 改进了准直扩束光路, 细化了光学系统, 分析了优化后光学系统在接收功率和杂光方面对跟踪探测的影响机理。基于优化的光学系统设计, 搭建实验系统进行了探测实验。实验结果表明, 补偿后的跟踪探测精度可达3 μm, 这满足仪器精密跟踪要求。

Abstract

Based on the analysis of the influence of optical system on tracking detection and combined with the instrumental functions, a smart method based on glued lens is proposed to reduce tracking offsets. The tracking optical path in the femtosecond laser tracker is optimized. At the same time, the optical path for collimation and expanding is improved, and the optical system is refined. The influence mechanism of receiving laser power and stray light in the optimized optical system on tracking detection is analyzed in detail. Based on the optimal design of the optical system, the experimental system is established and the detection experiment is conducted. The research results show that the tracking detection accuracy can reach 3 μm after compensation, which meets the precision tracking requirements of instruments.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TP212.14;TH702

DOI:10.3788/cjl201946.0304005

所属栏目:测量与计量

基金项目:国家重点研发计划重大科学仪器设备开发专项(2017YFF0107300)、中科院重点部署项目(KFZD-SW-415-1)、中科院院装备研制项目(YZ201618)、国家重大科学仪器设备开发专项(2011YQ120022)

收稿日期:2018-10-10

修改稿日期:2018-11-13

网络出版日期:2018-12-04

作者单位    点击查看

劳达宝:中国科学院光电研究院, 北京 100094中国科学院大学, 北京 100049
崔成君:中国科学院光电研究院, 北京 100094
王国民:中国科学院光电研究院, 北京 100094
周维虎:中国科学院光电研究院, 北京 100094中国科学院大学, 北京 100049

联系人作者:劳达宝(laodabao@aoe.ac.cn)

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引用该论文

Lao Dabao,Cui Chengjun,Wang Guomin,Zhou Weihu. Optimal Design and Analysis of Tracking Optical Paths in Femtosecond Laser Tracker[J]. Chinese Journal of Lasers, 2019, 46(3): 0304005

劳达宝,崔成君,王国民,周维虎. 飞秒激光跟踪仪跟踪光路的优化设计与分析[J]. 中国激光, 2019, 46(3): 0304005

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