光学学报, 2003, 23 (2): 220, 网络出版: 2006-06-27
液晶实时掩膜技术制作连续微光学元件
LCD Real-Time Mask Technique for Fabrication of Continuous Microoptical Elements
应用光学 实时掩膜 液晶显示器件 连续微光学元件 光刻 applied optics real-time mask liquid crystal display (LCD) continuous microoptical elements photolithography
摘要
提出制作连续微光学元件的一种新技术――液晶实时掩膜技术,阐述了其基本原理和制作方法。基于部分相干光成像理论,采用计算机模拟了用实时掩膜制作微透镜和微轴锥镜阵列的过程。同时建立了实验装置进行实验,用全色银盐干板(Kodak 131)通过酶刻蚀得到口径为118.7 μm,深为1.322 μm的56×48的轴锥镜的列阵。
Abstract
new technique for fabrication of continuous microoptical elements by using LCD (liquid crystal display) real-time mask is proposed, and its principle and design method are expatiated. Based on partial coherent imaging theory, the process to fabricate the micro-axicon and the microlens has been simulated. The experimental setup for LCD real-time mask technique was built by using the color LCD in authors′ laboratory. and the micro-axicon array has been fabricated. The 3|dimensional surface relief structure was shaped in the pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The caliber of axicon is 118.7 μm, and the etching depth is 1.322 μm
彭钦军, 郭永康, 陈波, 刘世杰, 曾阳素. 液晶实时掩膜技术制作连续微光学元件[J]. 光学学报, 2003, 23(2): 220. 彭钦军, 郭永康, 陈波, 刘世杰, 曾阳素. LCD Real-Time Mask Technique for Fabrication of Continuous Microoptical Elements[J]. Acta Optica Sinica, 2003, 23(2): 220.