在高功率激光辐照下,激光腔镜的夹持方式对热变形和偏转有很大影响.在理论上,采用ANSYS软件计算了硅镜(φ80 mm×12.5 mm),在特定辐照条件(100 W,φ40 mm、均匀、同轴、5 s)下的不同夹持方式下的热变形,径向固定的热变形镜面峰谷值(0.109 3 μm)小于轴向固定的热变形峰谷值(0.138 8 μm),三点固定的(0.121 μm)介于二者之间.在实验上,硅镜(φ75 mm×12.5 mm)在特定辐照条件(100 W、光斑椭圆17 mm×20 mm,5 s)下,压圈法(径向固定)的热变形为0.32 μm,镜面倾斜角为0.63 μrad;压板法(轴向固定)的热变形0.49 μm,镜面倾斜角为0.28 μrad.当采用三点锥孔定位法时,通过干涉条纹可发现镜面偏转减少.

The heat-deformation P-V value of Si mirror(φ80 mm×12.5 mm) fixed in radial-fixing way analyzed by ANSYS is 0.109 3 μm, with net irradiation heat 100 W in 5 s by a φ40 mm and co-axial uniform laser. And 0.138 8 μm by axial-fixing way and 0.121 μm in three points supporting respectively. The experimental result to the Si mirror(φ75 mm×12.5 mm), fixed in radial-fixing way is 0.32 μm with 100 W heat in 5 s by a 17 mm×20 mm and co-axial uniform laser, and 0.63 μm in axial-fixing way. The experimental mirror deflection is 0.63 μrad by radial-fixing way and 0.28 μrad by axial-fixing way. The deflection is the smallest by three-cone supporting way.