强激光与粒子束, 2005, 17 (1): 29, 网络出版: 2006-04-28   

夹持方式对镜面热变形及偏转的影响

Effects on the mirror's thermo-deform and deflection in different supporting way
作者单位
华中科技大学,激光技术国家重点实验室,湖北,武汉,430074
摘要
在高功率激光辐照下,激光腔镜的夹持方式对热变形和偏转有很大影响.在理论上,采用ANSYS软件计算了硅镜(φ80 mm×12.5 mm),在特定辐照条件(100 W,φ40 mm、均匀、同轴、5 s)下的不同夹持方式下的热变形,径向固定的热变形镜面峰谷值(0.109 3 μm)小于轴向固定的热变形峰谷值(0.138 8 μm),三点固定的(0.121 μm)介于二者之间.在实验上,硅镜(φ75 mm×12.5 mm)在特定辐照条件(100 W、光斑椭圆17 mm×20 mm,5 s)下,压圈法(径向固定)的热变形为0.32 μm,镜面倾斜角为0.63 μrad;压板法(轴向固定)的热变形0.49 μm,镜面倾斜角为0.28 μrad.当采用三点锥孔定位法时,通过干涉条纹可发现镜面偏转减少.
Abstract
The heat-deformation P-V value of Si mirror(φ80 mm×12.5 mm) fixed in radial-fixing way analyzed by ANSYS is 0.109 3 μm, with net irradiation heat 100 W in 5 s by a φ40 mm and co-axial uniform laser. And 0.138 8 μm by axial-fixing way and 0.121 μm in three points supporting respectively. The experimental result to the Si mirror(φ75 mm×12.5 mm), fixed in radial-fixing way is 0.32 μm with 100 W heat in 5 s by a 17 mm×20 mm and co-axial uniform laser, and 0.63 μm in axial-fixing way. The experimental mirror deflection is 0.63 μrad by radial-fixing way and 0.28 μrad by axial-fixing way. The deflection is the smallest by three-cone supporting way.
参考文献

[1] Bingham G R. Optical designs with large metal mirrors[A]. Proc of SPIE[C]. 1993, 1931: 100-109.

[2] 刘国庆,马文礼.大口径轻质镜支撑的有限元分析[J].光电工程,2001,28(5):14-17.
Liu G Q,Ma W L. The finite element analysis for large-aperture lightweight mirror mount. Opto-Electronic Engineering, 2001,28(5): 14-17.

[3] 于德利,桑凤亭,金玉奇,等.高能量密度激光器腔镜有限元分析[J].强激光与粒子束,2001,13(2):129-132.
Yu D L,Sang F T,Jin Y Q, et al. Finite element analysis of the mirror in high-energy density laser resonator. High Power Laser and Particle Beams, 2001,13 (2) :129-132.

[4] Sun F, Yu W F, Cheng Z H, et al. Experimental study of thermal deformation of honeycombed PCM cooled mirror in resonator[J]. Lasers in Engineering, 2002, 12(4): 271-280

[5] Ahmad A. Low-distortion mounting techniques for metal mirrors[A]. Proc of SPIE[C]. 1998, 3429:65-70.

[6] 叶松林.精密机械仪器零件[M].杭州:浙江大学出版社,1993.
Ye S L,Exact mechanical andinstrument part handbook.Hangzhou:Zhejiang University Press, 1993.

[7] 李景镇.光学手册[M].西安:陕西科学技术出版社,1986
Li J Z.Optical Handbook.Xian:Shaanxi Science and Technology Press,1986.

[8] 孙峰,程祖海,余文峰,等.激光器腔镜夹持方式对热变形的影响[J].强激光与粒子束,2003,15(8):751-754.
Sun F,Cheng Z H,Yu W F et al. Effects of clamping methods for laser mirrors on thermal deformation. High Power Laser and Particle Beams, 2003, 15(8) :751-754.

[9] 多丽萍,闵祥德,孙以珠,等.转镜扫描测量超音速氧碘化学激光器二维增益分布[J].强激光与粒子束,1999,11(4):385-388.
Duo L P,Min X D, Sun Y Z, et al. Study of 2D small-signal gain for a supersonic COIL by a scanning mirror. High Power Laser and Particle Beams,1999,11(4) :385-388.

[10] 孙峰,余文峰,程祖海,等.非均匀光斑导致相变镜镜面偏转的研究[J].强激光与粒子束,2003,15(4):331-337.
Sun F,Yu W F,Cheng Z H, et al, Deflection of phase change cooled mirror induced by irregular facula. High Power Laser and Particle Beams, 2003,15 (4) :331-337.

[11] 张耀宁.一种新的镜架-锥孔耦合激光镜镜架[P].中国专利ZL01273469.1,2002-6-20.
Zhang Y N.A new kind of mirror supporting waycone coupling laser mirror. China patent ZL01273469.1,2002-6-20.

余文峰, 孙峰, 程祖海, 刘倚红, 周次明, 张耀宁. 夹持方式对镜面热变形及偏转的影响[J]. 强激光与粒子束, 2005, 17(1): 29. YU Wen-feng, SUN Feng, CHENG Zu-hai, LIU Yi-hong, ZHOU Ci-ming, ZHANG Yao-ning. Effects on the mirror's thermo-deform and deflection in different supporting way[J]. High Power Laser and Particle Beams, 2005, 17(1): 29.

本文已被 5 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!