光子学报, 2010, 39 (12): 2220, 网络出版: 2011-01-26
离轴非球面反射镜补偿检验的计算机辅助装调技术研究
Computer-aided Alignment of Off-axis Aspheric Mirrors in Null Testing
非球面检测 补偿器 调整误差 计算机辅助装调 Key words:Asphere testing Null corrector Alignment error Computer-aided alignment
摘要
利用零补偿器实施离轴非球面元件面形的干涉检测中，为了实现反射镜的高准确度检测，对其干涉结果中的误差信息进行了分析.根据零补偿器的补偿原理，提出一种新的调整误差分离方法，建立了离轴非球面补偿检验的调整误差分离模型，并利用该模型对一块离轴非球面反射镜进行了仿真实验.调整前由调整误差引入的波像差为0.2332λRMS(λ=632.8 nm)，根据仿真结果调整后的波像差为0.0026λRMS,表明该方法具有较高的准确度，可有效提高检测效率.
Abstract
Abstract:Based on the principle of null lens,a new method of error-separation was proposed in null testing.A mathematic model was developed to separate misalignment-induced aberration from the test result.The method was used in the simulations of an off-axis aspheric mirror.The wavefront aberration induced by misalignment is 0.0026λRMS (λ=632.8 nm) after the alignment,compared with 0.2332λRMS before the alignment,which reflects that this method has high accuracy and can improve the efficiency of the null test.
陈钦芳, 李英才, 马臻, 李旭阳, 郭永祥. 离轴非球面反射镜补偿检验的计算机辅助装调技术研究[J]. 光子学报, 2010, 39(12): 2220. CHEN Qin-fang, LI Ying-cai, MA Zhen, LI Xu-yang, GUO Yong-xiang. Computer-aided Alignment of Off-axis Aspheric Mirrors in Null Testing[J]. ACTA PHOTONICA SINICA, 2010, 39(12): 2220.
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