针对传统微泵结构复杂、制备困难等不足，提出了一种新型的基于激光冲击波力学效应的微泵驱动方法，使用该方法设计的微泵结构简单、易于制造、成本低，有利于微型化及与微机电系统（MEMS）集成。通过研究激光冲击波的力学模型，设计了无阀型微泵，并计算出其耦合模态。验证了该驱动方法的可行性；通过流固耦合仿真研究了激光的频率、占空比、功率密度、光斑直径等参数对微泵流量的影响，并进一步分析了流量的稳定性。研究结果表明，功率密度和光斑直径是影响流量的主要因素，占空比为0.6时微泵流量最大，微泵稳定工作后各脉冲流量相差不超过5%。

Aiming at the deficiency which traditional micropump structures are complex, and difficult to fabricate, a novel actuating approach is proposed basing on mechanical effect of laser-induced shock waves, micropump designed by this approach has the characteristics of simple structure, ease to manufacture, low cost and the benefit of miniaturization and integration with micro electro mechanical system (MEMS) system. The modal of surface pressure produced by laser induced shock waves is investigated. The valve-less micropump is designed, and its coupling modal is calculated. The feasibility of this actuated approach is validated. The influence of laser parameters (frequency, duty cycle, intensity, spot diameter) on flow rate is analyzed by the fluid-structure interaction simulation and the stability of flow rate is also investigated. The result reveals that laser intensity and spot diameter are the main influencing factors on the flow rate, flow rate maximizes when duty cycle is 0.6, the difference of flow rate at each single pulse is less than 5% at steady operation.