利用具有相反热光特性的氮氧化硅(SiON)与聚合物材料，采用混合集成技术设计了一种低功耗全内反射（TIR）热光波导开关。该光开关通过在两交叉的氮氧化硅波导芯的X结中心部分制作一个深度等于波导芯厚度的狭缝，并在其中填充与波导包层相同的聚合物材料，同时在狭缝聚合物上方制作加热电极来实现开关功能。理论分析表明，通过选择与氮氧化硅折射率相匹配的聚合物材料，并优化设计单模光波导尺寸，两交叉波导间的夹角、所开狭缝的宽度以及相应的加热电极结构，对于1550 nm的工作波长，开关的驱动功率在低至2.3 mW时仍可实现消光比均大于36 dB，串扰均小于-36 dB的TE与TM模式。

By utilizing the opposite thermo-optical characteristics of silicon oxynitride (SiON) and polymer materials, a hybrid integrated SiON/polymer waveguide total internal reflection (TIR) thermo-optic (TO) switch has been designed. The operation of the suggested switch is using an electrode heater, which is fabricated on a trench that is located in the center part of SiON waveguide X-junction and filled with the same polymer material as the cladding used, to adjust the refractive index of the polymer filled in the trench so as to realize TIR effect. Theoretical results show that, the suggested switch can realize an extinction ratio more than 36 dB and a crosstalk lower than -36 dB with very low driving power of 2.3 mW for TE and TM polarization by choosing the suitable polymer material which index matches that of SiON, and then by optimizing the design parameters of the single waveguide, the cross angle between the two waveguide, the width of the trench, and the structure of the electrode heater.