中国激光, 2011, 38 (11): 1117001, 网络出版: 2011-10-17   

基于氮氧化硅与聚合物混合集成低功耗全内反射热光开关

Hybrid Integrated SiON/Polymer Low Power Thermo-Optic Switch with Total Internal Reflection Effect
作者单位
1 电子科技大学通信与信息工程学院, 四川 成都 611731
2 电子科技大学机械电子工程学院, 四川 成都 611731
摘要
利用具有相反热光特性的氮氧化硅(SiON)与聚合物材料,采用混合集成技术设计了一种低功耗全内反射(TIR)热光波导开关。该光开关通过在两交叉的氮氧化硅波导芯的X结中心部分制作一个深度等于波导芯厚度的狭缝,并在其中填充与波导包层相同的聚合物材料,同时在狭缝聚合物上方制作加热电极来实现开关功能。理论分析表明,通过选择与氮氧化硅折射率相匹配的聚合物材料,并优化设计单模光波导尺寸,两交叉波导间的夹角、所开狭缝的宽度以及相应的加热电极结构,对于1550 nm的工作波长,开关的驱动功率在低至2.3 mW时仍可实现消光比均大于36 dB,串扰均小于-36 dB的TE与TM模式。
Abstract
By utilizing the opposite thermo-optical characteristics of silicon oxynitride (SiON) and polymer materials, a hybrid integrated SiON/polymer waveguide total internal reflection (TIR) thermo-optic (TO) switch has been designed. The operation of the suggested switch is using an electrode heater, which is fabricated on a trench that is located in the center part of SiON waveguide X-junction and filled with the same polymer material as the cladding used, to adjust the refractive index of the polymer filled in the trench so as to realize TIR effect. Theoretical results show that, the suggested switch can realize an extinction ratio more than 36 dB and a crosstalk lower than -36 dB with very low driving power of 2.3 mW for TE and TM polarization by choosing the suitable polymer material which index matches that of SiON, and then by optimizing the design parameters of the single waveguide, the cross angle between the two waveguide, the width of the trench, and the structure of the electrode heater.
参考文献

[1] B. J. Li, S. J. Chuan. 2×2 optical waveguide switch with bow-tie electrode based on carrier-injection total internal reflection in SiGe alloy [J]. IEEE Photon. Technol. Lett., 2001, 13(3): 206~208

[2] X. Q. Jiang, J. Y. Yang, H. Z. Zhan et al.. Photon induced total internal reflection all optical switches [J]. IEEE Photon. Technol. Lett., 2004, 16(2): 443~445

[3] A. L. Zhang, K. T. Chan, M. S. Demokan et al.. Integrated liquid crystal optical switch based on total internal reflection [J]. Appl. Phys. Lett., 2005, 86(21): 211108

[4] 任海霞, 刘立人, 宋哲 等. 晶体的连续双折射双反射及其集成应用:1×N电光开关 [J]. 光学学报, 2004, 24(2): 152~157

    Ren Haixia, Liu Liren, Song Zhe et al.. Double refraction and reflection of sequential interfaces in a crystal and application to integration of 1×N optical switch [J]. Acta Optica Sinica, 2004, 24(2): 152~157

[5] 张雄军, 吴登生, 张君 等. 20 mm孔径重复频率等离子体电光开关研究 [J]. 光学学报, 2010, 30(6): 1772~1775

    Zhang Xiongjun, Wu Dengsheng, Zhang Jun et al.. Research on repetition rate plasma Pockels cell with 20 mm aperture [J]. Acta Optica Sinica, 2010, 30(6): 1772~1775

[6] J. Y. Yang, Q. J. Zhou, Ray T. Chen. Polyimide-waveguide-based thermal optical switch using total-internal-reflection effect [J]. Appl. Phys. Lett., 2002, 81(16): 2947~2949

[7] 杨建义, 江晓清, 杨方辉 等. 2×2有机聚合物的全内反射型热光光开关 [J]. 中国激光, 2003, 30(2): 137~140

    Yang Jianyi, Jiang Xiaoqing, Yang Fanghui et al.. 2×2 total internal reflection optical switch using thermo-optic effect of polymer [J]. Chinese J. Lasers, 2003, 30(2): 137~140

[8] Xiaolong Wang, Brie Howley. Polarization independent all-wave polymer-based TIR thermo-optic switch [J]. J. Lightwave Technol., 2006, 24(3): 1558~1565

[9] T. Saito, Tatsuo Hatta. Polymeric waveguide optical switch with bascule structure using novel trench forming process [J]. J. Lightwave Technol., 2009, 27(6): 791~798

[10] L. Eldada, L. W. Shacklette. Advances in polymer integrated optics [J]. IEEE J. Sel. Top. Quantum Electron., 2000, 6(1): 54~68

[11] 温昌礼, 季家镕, 窦文华 等. 集成电路用聚合物光波导材料 [J]. 激光与光电子学进展, 2009, 46(7): 36~40

    Wen Changli, Ji Jiarong, Dou Wenhua et al.. Polymer material for optical waveguide used in integrated circuit [J]. Laser & Optoelectronics Progress, 2009, 46(7): 36~40

[12] G. -L. Bona, R. Germann, B. J. Offrein. SiON high-refractive-index waveguide and planar lightwave circuits [J]. IBM, J. Res. & Dev., 2003, 47: 239~249

[13] 孟祥森, 袁骏, 马青松 等. 氮氧化硅薄膜制备方法的研究[J]. 材料科学与工程, 1999, 17(4): 10~13

    Meng Xiangsen, Yuang Jun, Ma Qingsong et al.. Study on the preparation methods of silicon oxynitride thin films [J]. Materials Science & Engineering, 1999, 17(4): 10~13

[14] 余辉, 江晓清, 杨建义 等. 热光效应下的全内反射光束展宽规律以及应用[J]. 光学学报, 2005, 25(6): 816~820

    Yu Hui, Jiang Xiaoqing, Yang Jianyi et al.. Beam expansion law and its application in total internal reflection induced by thermo-optic effect [J]. Acta Optica Sinica, 2005, 25(6): 816~820

[15] Chen S. Tsai, Bumman Kim, Fathirel-Akkari. Optical channel waveguide switch and coupler using total internal reflection [J]. IEEE J. Quantum Electron., 1978, QE-14(7): 513~517

[16] 刘立杰, 于荣金. 介质光波导模式传播特性的有效折射率/有限元分析法[J]. 光子学报, 1994, 23(1): 25~32

    Liu Lijie, Yu Rongjin. Analysis of the mode propagation characteristics of dielectric waveguides by the effective index-finite element method [J]. Acta Photonica Sinica, 1994, 23(1): 25~32

[17] J. Peatross, M. Ware. Physics of light and optics. 2006 [DB/OL]. Available: http://optics.byu.deu/. pp: 79~88

[18] 杨建义, 江晓清, 杨方辉 等. 有机聚合物热光器件的热学模型[J]. 光电子·激光, 2000, 11(4): 349~351

    Yang Jianyi, Jiang Xiaoqing, Yang Fanghui et al.. Thermal model of thermo-optical polymer devices [J]. J. Optoelectronics·Laser, 2000, 11(4): 349~351

[19] 余辉, 江晓清, 杨建义 等. 有机聚合物热光器件的瞬态响应分析[C]. 中国光学学会2004年学术大会, 杭州,2004: 145~148

    Yu Hui, Jiang Xiaoqing, Yang Jianyi et al.. Analysis of time response in the polymer thermo-optic devices [C]. The ICPR of Chinese Optical Society in 2004, Hangzhou, 2004: 145~148

张燕, 陈开鑫, 郑军凯. 基于氮氧化硅与聚合物混合集成低功耗全内反射热光开关[J]. 中国激光, 2011, 38(11): 1117001. Zhang Yan, Chen Kaixin, Zheng Junkai. Hybrid Integrated SiON/Polymer Low Power Thermo-Optic Switch with Total Internal Reflection Effect[J]. Chinese Journal of Lasers, 2011, 38(11): 1117001.

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