通过发射光谱测量和拟合不同的微波脉宽和气压下C波段微波放电的氮气等离子体振动温度、转动温度和电子激发温度。气压在266～400 Pa时, 等离子体的振动温度为(2700±100) K, 电子激发温度为(0.32 ±0.015) eV, 转动温度随脉宽增加而上升, 实验中测得的最大转动温度为370 K。偏离266～400 Pa时, 振动温度和电子激发温度同时出现了下降的趋势, 而转动温度出现了上升的趋势。这意味着电子激发温度和振动温度具有很强的关联性。

Emission spectrum measurement and simulation are conducted to derive the vibration, rotation and electronic excitation temperature of nitrogen plasmas generated in microwave discharge with different pulse width and pressure. At the pressure of 266~400 Pa, the vibration temperature of plasmas is (2700±100) K, electronic excitation temperature is (0.32±0.015) eV. Rotation temperature rises with the rising of pulse width, the maximum rotation temperature measured in this experiment is 370 K. Vibration temperature and electronic excitation temperature trend to decrease at the same time at the pressure away from 266～400 Pa, but rotation temperature trends to increase. This means electronic excitation temperature and vibration temperature have a strong relationship.