在制备薄膜改善微,通道表面粗糙度和疏水性研究中发现,激光固化光斑的直径与微通道宽度的匹配十分重要.针对具有自主知识产权的微通道同轴气吹展技术和光预固化制备NOA61薄膜技术背景,提出了一种掩膜设计思路,即设计分析掩膜直径在微米级的,以孔中心为缩放原点自动调节孔径的激光微加工掩膜装置.这种装置可以根据微通道的不同宽度自动调节光圈半径,同时掩膜孔中心始终位于微通道中心线上,在设计分析和模拟实验之后,其结果所形成误差态势是一致的.这表明,设计方案可实现误差与半径比小于5%的“微米级以孔中心为缩放原点自动调节孔径的激光微加工掩膜装置”;使用成熟精密的成品平移移动和转动组件可以搭建运动误差内的该掩膜装置,省略了在零部件加工和装配过程中制作单一掩膜时,对误差的技术要求和控制,将促进面向微通道激光微加工技术的发展.

The research of making thin film proves that the match of the diameter of laser spot and the width of the micro channel is important for improving surface roughness of micro channel and hydrophobic property. With proprietary technology of making NOA61 thin film by using blowing gas and shining light on the same axis,this paper has presented an idea of mask design,namely that designs and analysis of laser micro processing mask system whose mask with diameters in the micrometer level,scaling the origin at the center of the hole and adjusting the aperture automatically. This system can self-adjust the aperture by the algorithm input to the computer designed with the change of the micro channel,with hole center aiming at the center line of the micro channel everywhere,including the corner. The results showed that the tendency of design analysis and simulation are identical,which turns out that:(1)The design plan is feasible; we can limited the ratio of shape error tothe radius less than 5%. (2)Translating and rotating components by using mature and sophisticated products,the mask system can be set up within the system motion errors. Reduced theerror of the technical requirements and assembly processes,it will promote the development of microchannel for laser micromachining technology.