太赫兹科学与电子信息学报, 2015, 13 (5): 684, 网络出版: 2015-11-30
近太赫兹频段线性注真空器件的研究
Research of near-terahertz linear-beam vacuum electronic devices
太赫兹 行波管 返波管 微机电系统技术 金刚石 terahertz Traveling Wave Tube Backward-Wave Oscillator Micro Electro Mechanical System diamond
摘要
介绍了太赫兹频段真空电子器件的研究和开发进展，包括慢波结构理论、设计、模拟及优化，微加工和微组装技术，整管技术等。这些器件包括行波管、返波管、斜注管、止带振荡器及行波管谐波放大器等，高频结构以折叠波导慢波结构为主，在太赫兹返波管中则利用叶片加载波导慢波结构。器件技术包括微机电系统(MEMS)技术，微波等离子体化学气相沉积(MPCVD)金刚石生长、金属化和封接技术等。最后给出W 波段、G 波段以及340 GHz 部件和器件所达到的性能。
Abstract
The research and development activities of near-terahertz linear beam vacuum electronic devices are described, including slow wave structure theory, parts design, simulation and optimization, micro-fabrication and micro-assembly techniques, tube integration technologies, etc. These devices include Traveling Wave Tubes(TWTs), Backward-Wave Oscillators(BWOs), clinotrons, Stop-Band Oscillators and TWT harmonic amplifiers, etc with folded waveguide and vane-loaded waveguide as high frequency interaction structures. The devices technologies are mainly composed of Micro Electro Mechanical System(MEMS) technology, Microwave Plasma Chemical Vapor Deposotion(MPCVD) diamond process, metallization and mounting technique, etc. Finally, specifications of devices at W-band, 220 GHz and 340 GHz frequency bands are given.
冯进军, 蔡军, 胡银富, 李含雁, 杜英华, 唐烨, 李莉莉, 潘攀. 近太赫兹频段线性注真空器件的研究[J]. 太赫兹科学与电子信息学报, 2015, 13(5): 684. FENG Jinjun, CAI Jun, HU Yinfu, LI Hanyan, DU Yinghua, TANG Ye, LI Lili, PAN Pan. Research of near-terahertz linear-beam vacuum electronic devices[J]. Journal of terahertz science and electronic information technology, 2015, 13(5): 684.
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