目前，高数值孔径(NA)投影光刻物镜都普遍采用非球面元件来提升光学系统的成像质量并降低系统的复杂度，但是高精度非球面检测一直是光学检测领域的一大难题，也是限制高NA投影光刻物镜制造的关键因素。为了解决这一难题，针对高NA投影光刻物镜中的一偶次高次非球面，论述了计算全息图(CGH)相位与空间频率的关系，以及相位与空间频率的计算方法；采用点光源照明模式，详细分析了CGH设计时的关键参数的选择方法和避免CGH非工作衍射级次的干扰的方法；采用所选定的设计参数，加工制作了CGH，并用此CGH完成了对非球面的高精度检测。经过多轮加工检测迭代，最终非球面的收敛精度的均方根（RMS）达到了0.46 nm。

At present, aspherical elements are usually used to improve imaging quality and degrade complexity of system in the high numerical aperture (NA) projected lithography objective. However, high-precision aspherical surface testing has been a major problem in the field of optical detection. It is also the key factor which restricts the fabrication of high NA projected lithography objective. To solve this problem and aim at high NA projected lithography objective in the even of a high order asphere, the relationship and the calculating method between the phase and spatial frequency of computer-generated hologram (CGH) are discussed in the paper first. Then, by using a point source illumination mode, the methods of choosing key CGH design parameters and avoiding the interference of non-working order diffraction rays are analyzed in detail. Lastly, a CGH is fabricated using the design parameters chosen from this paper, and the asphere is tested by this CGH precisely. The root mean square value of the aspheric surface′s convergence precision eventually reaches 0.46 nm after several fabricating and testing iterations.