氩气对类金刚石薄膜性能的影响

杨永亮; 岳莉; 贾志君; 李娜; 唐昊龙

doi:doi:10.3788/lop51.093101

激光与光电子学进展, 2014, 51 (9): 093101, 网络出版: 2014-08-15

氩气对类金刚石薄膜性能的影响下载： 642次

Effect of Ar on the Properties of Diamond-Like Carbon Films

论文大纲

杨永亮 ^1,*岳莉 ¹贾志君 ¹李娜 ¹唐昊龙 ²

作者单位

¹ 凯里学院物理与电子工程学院，贵州凯里 556011

² 长春理工大学，吉林长春 120022

薄膜类金刚石热稳定性粗糙度 thin films diamond-like carbon thermal stability roughness

AI 词云图 AI一句话精读 AI短摘要

注：本部分内容由 AI 自动生成，请您知悉。

摘要

为了探究氩气流量对含氢类金刚石薄膜(a-C:H)性能的影响规律，采用射频等离子体增强化学气相沉积（RFPECVD）技术，以正丁烷（C4H10）为反应物，在硅基底上沉积含氢类金刚石薄膜，通过改变氩气的流量分析氩气含量对含氢类金刚石薄膜性能的影响。红外光谱、表面粗糙度、硬度及热稳定性的测试表明，随着氩气流量的增加，降低了氢在类金刚石薄膜中的相对含量，在一定程度上增加了薄膜表面粗糙度，表面粗糙度由Ra= 3.732 nm 增加到Ra=8.628 nm，降低了薄膜的硬度，薄膜的硬度由23 GPa 降低到20 GPa，对类金刚石薄膜的热稳定性几乎无影响，但薄膜的应力从-1.8 GPa 降低到-1.1 GPa。

Abstract

In order to explore the effect of the flow rate of Ar on the properties of diamond-like carbon (DLC) films. The DLC (a- C:H) films are prepared on Si substrate by RF- PECVD technology with n- butane(C4H10) as the reactant, the effect of Ar on the properties of DLC films is studied by changing the flow rate of Ar. Determination of Fourier transform infrared spectroscopy, hardness, thermal stability and roughness of the surface demonstrates that the relative content of H in the DLC and the hardness of DLC films decrease with the increase of the flow rate of Ar, the hardness decreases from 23 GPa to 20 GPa, and the roughness of the surface increases from Ra= 3.732 nm to Ra= 8.628 nm, the flow rate of Ar almost has no effect on the thermal stability of DLC films, but the stress decreases from -1.8 GPa to -1.1 GPa.

参考文献

[1] 程勇, 王会升, 郭延龙. 飞秒激光沉积红外窗口类金刚石增透保护膜[J]. 红外与激光工程, 2012, 40(12): 2406-2407.

Cheng Yong, Wang Huisheng, Guo Yanlong. Anti- reflective and protective diamond- like carbon films on infrared windows deposited by femtosecond pulsed laser [J]. Infrared and Laser Engineering, 2012, 40(12): 2406-2407.

[2] 于天燕, 朱福荣, 刘定权, 等. 硫化锌透镜中长波红外宽带增透膜的研制[J]. 光学学报, 2005,25(2): 270-273

Yu Tianyan, Zhu Furong, Liu Dingquan, et al.. Design and deposition of broadband IR antireflection coatings on ZnS lenses [J]. Acta Optica Sinica, 2005, 25(2): 270-273.

[3] 罗乐, 张君芳, 方晓东, 等. 激光脉冲能量对类金刚石薄膜及其红外光学特性的影响[J]. 中国激光, 2010, 37(12): 3121-3123.

Luo Le, Zhang Junfang, Fang Xiaodong, et al.. Influence of the laser pulsed energy upon the diamond-like carbon film and its infrared property [J]. Chinese J Lasers, 2010, 37(12): 3121-3123.

[4] 李晓伟, 周毅, 孙丽丽, 等. 椭偏法表征四面体非晶碳薄膜的化学键结构[J]. 光学学报, 2012, 32(10): 1031005.

Li Xiaowei ,Zhou Yi, Sun Lili, et al.. Determination of chemical bond of tetrahedral amorphous carbon film by ellipsometry approach [J]. Acta Optica Sinica, 2012, 32(10): 1031005.

[5] 罗乐, 汪毅, 储雅琼, 等. 氮气压强对脉冲激光沉积类金刚石薄膜和红外光学特性的影响[J]. 中国激光, 2011, 38(9): 0907001.

Luo Le, Wang Yi, Chu Yaqiong, et al.. Influence of the nitrogen pressure on diamond- like carbon film deposited by pulsed laser and its infrared property [J]. Chinese J Lasers, 2011, 38(9): 0907001.

[6] 陈光华, 邓金祥. 新型电子薄膜材料[M]. 北京: 化学工业出版社, 2002. 147-152.

Chen Guanghua, Deng Jinxiang. New Electronic Thin Films [M]. Beijing: Chemical Industry Press, 2002. 147-152.

[7] Kobayashi K, Yamamoto K, Mutsukura N, et al.. Sputtering characteristics of diamond and hydrogenated amorphous carbon films by r. f. plasma [J]. Thin Solid Films, 1990, 185(1): 71-78.

[8] 杨莉, 陈强, 张受业. PECVD 法沉积类金刚石膜的结构及其摩擦学性能[J].真空科学与技术学报, 2008, 29(3): 293-295.

Yang Li, Chen Qiang, Zhang Shouye. Microstructures and tribological properties of diamond like- carbon films grown by plasma enhanced chemical vapor deposition [J]. Chinese J Vacuum Science and Technology, 2008, 29(3): 293-295.

[9] 薛海鹏, 卢文壮, 孙达飞, 等. 纳米化学气相沉积金刚石的拉曼光谱[J]. 中国激光, 2014, 40(7): 0707002.

Xue Haipeng, Lu Wenzhuang, Sun Dafei, et al.. Roman spectroscopy of nanocrystalline chemical vapor deposition diamond [J]. Chinese J Lasers, 2014, 40(7): 0707002.

[10] 薛群基, 王立平. 类金刚石碳基薄膜材料[M]. 北京: 科学出版社, 2012. 43-50.

Xue Qunji, Wang Liping. Diamond-Like Carbon Thin Film Materials [M]. Beijing: Science Press, 2012. 43-50.

杨永亮, 岳莉, 贾志君, 李娜, 唐昊龙. 氩气对类金刚石薄膜性能的影响[J]. 激光与光电子学进展, 2014, 51(9): 093101. Yang Yongliang, Yue Li, Jia Zhijun, Li Na, Tang Haolong. Effect of Ar on the Properties of Diamond-Like Carbon Films[J]. Laser & Optoelectronics Progress, 2014, 51(9): 093101.

氩气对类金刚石薄膜性能的影响下载： 642次

关于本站 Cookie 的使用提示

全站搜索

氩气对类金刚石薄膜性能的影响 下载： 642次

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索

氩气对类金刚石薄膜性能的影响下载： 642次