掩模偏转方向对硅尖形状的影响
崔岩, 石二磊, 夏劲松, 王立鼎. 掩模偏转方向对硅尖形状的影响[J]. 光学 精密工程, 2009, 17(8): 1865.
CUI Yan, SHI Er-lei, XIA Jin-song, WANG Li-ding. Effect of changing mask direction on tip shape[J]. Optics and Precision Engineering, 2009, 17(8): 1865.
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崔岩, 石二磊, 夏劲松, 王立鼎. 掩模偏转方向对硅尖形状的影响[J]. 光学 精密工程, 2009, 17(8): 1865. CUI Yan, SHI Er-lei, XIA Jin-song, WANG Li-ding. Effect of changing mask direction on tip shape[J]. Optics and Precision Engineering, 2009, 17(8): 1865.
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