不同应力增透膜对半导体激光器性能的影响
崔碧峰, 程瑾, 郝帅, 李彩芳, 王豪杰. 不同应力增透膜对半导体激光器性能的影响[J]. 半导体光电, 2020, 41(1): 77.
CUI Bifeng, CHENG Jin, HAO Shuai, LI Caifang, WANG Haojie. Effect of Different Facet Coating Stress on The Performance of Laser Diodes[J]. Semiconductor Optoelectronics, 2020, 41(1): 77.
[1] 王立军, 宁永强, 秦 莉, 等. 大功率半导体激光器研究进展[J]. 发光学报, 2015, 36(1): 1-19.
[2] 曹玉莲, 王 乐, 廖新胜, 等. 大功率半导体激光器的可靠性研究[J]. 发光学报, 2003, 24(1): 100-102.
Cao Yulian, Wang Le, Liao Xinsheng, et al. Reliability of high-power semiconductor laser diodes[J]. Chin. J. Lumin., 2003, 24(1): 100-102.
[3] 套格套, 路国光, 尧 舜, 等. 808nm大功率半导体激光器腔面膜优化设计[J]. 半导体光电, 2007, 28(6): 778-780, 784.
Tao Getao, Lu Guoguang, Yao Shun, et al. Optimized design of cavity facet coatings of 808nm high power semiconductor laser[J]. Semiconductor Optoelectronics, 2007, 28(6): 778-780, 784.
[4] 顾培夫, 郑臻荣, 赵永江, 等. TiO2和SiO2薄膜应力的产生机理及实验探索[J]. 物理学报, 2006, 55(12): 268-272.
Gu Peifu, Zheng Zhenrong, Zhao Yongjiang, et al. Mechanism and experimental exploration of stress in TiO2 and SiO2 thin films[J]. Acta Physica Sinica, 2006, 55(12): 268-272.
[5] Thielsch R, Gatto A, Kaiser N. Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region[J]. Appl. Opt., 2002, 41(16): 3211-3217.
[6] Gaspar J, Chu V, Conde J P. Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films[J]. J. of Microelectromechanical Systems, 2005, 14(5): 1082-1088.
[7] Sasaki M, Yuki S, Hane K. Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar[J]. IEEE Photon. Technol. Lett., 2006, 18(15): 1573-1575.
[8] Thompson S E, Armstrong M, Auth C, et al. A logic nanotechnology featuring strained-silicon[J]. IEEE Electron Device Lett., 2004, 25(4): 191-193.
[9] Thompson S, Anand N, Armstrong M, et al. A 90nm logic technology featuring 50nm strained silicon channel transistors, 7 layers of Cu interconnects, Low k ILD and 1/spl mu/m/sup 2/SRAM cell[C]// Digest. Inter. Electron Devices Meeting, 2002.
[10] Sun X, Liu J, Kimerling L C, et al. Toward a germanium laser for integrated silicon photonics[J]. IEEE J. of Sel. Topics in Quantum Electronics, 2010, 16(1): 124-131.
[11] Hom-On C, Horprathum M, Eiamchai P, et al. Influence of substrate temperature on deposition rate and optical properties of aluminum oxide thin films prepared by reactive DC sputtering technique[J]. Key Engin. Materials, 2016, 675/676: 281-284.
[12] Shao S, Fan Z, Shao J, et al. Evolutions of residual stress and microstructure in ZrO2 thin films deposited at different temperatures and rates[J]. Thin Solid Films, 2003, 445(1): 59-62.
[13] 江剑平. 半导体激光器[M]. 北京: 电子工业出版社, 2000: 87-90.
Jiang Jianping. Semiconductor Lasers[M]. Beijing: Publishing House of Electronics Industry, 2000: 87-90.
崔碧峰, 程瑾, 郝帅, 李彩芳, 王豪杰. 不同应力增透膜对半导体激光器性能的影响[J]. 半导体光电, 2020, 41(1): 77. CUI Bifeng, CHENG Jin, HAO Shuai, LI Caifang, WANG Haojie. Effect of Different Facet Coating Stress on The Performance of Laser Diodes[J]. Semiconductor Optoelectronics, 2020, 41(1): 77.
PDF全文
