半导体光电, 2020, 41 (1): 77, 网络出版: 2020-04-13   

不同应力增透膜对半导体激光器性能的影响

Effect of Different Facet Coating Stress on The Performance of Laser Diodes
作者单位
北京工业大学 光电子技术省部共建教育部重点实验室, 北京 100124
摘要
采用离子辅助电子束蒸发方法, 通过改变制备Al2O3增透膜时基底的温度, 在边发射半导体激光器前腔面上分别制备了张应力和压应力增透膜。比较了张应力、压应力两种不同增透膜对半导体激光器性能的影响。结果表明: 在10A注入电流下, 当半导体激光器的增透膜为张应力状态时, 输出功率为8.11W; 当半导体激光器的增透膜为压应力状态时, 输出功率为7.74W。可见, 在半导体激光器前腔面制备张应力增透膜有效地提高了半导体激光器的斜率效率。
Abstract
The ion-assisted electron beam evaporation was used to fabricate laser diodes with tensile stress and compressive stress anti-reflective film coated on the front facet by changing the temperature of the substrate when preparing the Al2O3 film. The effects of two different anti-reflection coatings on the performance of laser diodes were compared. The results show that output power of the laser diode with tensile stress anti-reflective coating was 8.11W while the laser diode with compressive stress anti-reflective coating was 7.74W at 10A injection current. Therefore, fabricating tensile stress anti-reflective coated on the laser diode facet can more effectively increase the slope efficiency of laser diodes.
参考文献

[1] 王立军, 宁永强, 秦 莉, 等. 大功率半导体激光器研究进展[J]. 发光学报, 2015, 36(1): 1-19.

    Wang Lijun, Ning Yongqiang, Qin Li, et al. Development of high power diode laser[J]. Chin. J. Lumin., 2015, 36(1): 1-19.

[2] 曹玉莲, 王 乐, 廖新胜, 等. 大功率半导体激光器的可靠性研究[J]. 发光学报, 2003, 24(1): 100-102.

    Cao Yulian, Wang Le, Liao Xinsheng, et al. Reliability of high-power semiconductor laser diodes[J]. Chin. J. Lumin., 2003, 24(1): 100-102.

[3] 套格套, 路国光, 尧 舜, 等. 808nm大功率半导体激光器腔面膜优化设计[J]. 半导体光电, 2007, 28(6): 778-780, 784.

    Tao Getao, Lu Guoguang, Yao Shun, et al. Optimized design of cavity facet coatings of 808nm high power semiconductor laser[J]. Semiconductor Optoelectronics, 2007, 28(6): 778-780, 784.

[4] 顾培夫, 郑臻荣, 赵永江, 等. TiO2和SiO2薄膜应力的产生机理及实验探索[J]. 物理学报, 2006, 55(12): 268-272.

    Gu Peifu, Zheng Zhenrong, Zhao Yongjiang, et al. Mechanism and experimental exploration of stress in TiO2 and SiO2 thin films[J]. Acta Physica Sinica, 2006, 55(12): 268-272.

[5] Thielsch R, Gatto A, Kaiser N. Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region[J]. Appl. Opt., 2002, 41(16): 3211-3217.

[6] Gaspar J, Chu V, Conde J P. Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films[J]. J. of Microelectromechanical Systems, 2005, 14(5): 1082-1088.

[7] Sasaki M, Yuki S, Hane K. Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar[J]. IEEE Photon. Technol. Lett., 2006, 18(15): 1573-1575.

[8] Thompson S E, Armstrong M, Auth C, et al. A logic nanotechnology featuring strained-silicon[J]. IEEE Electron Device Lett., 2004, 25(4): 191-193.

[9] Thompson S, Anand N, Armstrong M, et al. A 90nm logic technology featuring 50nm strained silicon channel transistors, 7 layers of Cu interconnects, Low k ILD and 1/spl mu/m/sup 2/SRAM cell[C]// Digest. Inter. Electron Devices Meeting, 2002.

[10] Sun X, Liu J, Kimerling L C, et al. Toward a germanium laser for integrated silicon photonics[J]. IEEE J. of Sel. Topics in Quantum Electronics, 2010, 16(1): 124-131.

[11] Hom-On C, Horprathum M, Eiamchai P, et al. Influence of substrate temperature on deposition rate and optical properties of aluminum oxide thin films prepared by reactive DC sputtering technique[J]. Key Engin. Materials, 2016, 675/676: 281-284.

[12] Shao S, Fan Z, Shao J, et al. Evolutions of residual stress and microstructure in ZrO2 thin films deposited at different temperatures and rates[J]. Thin Solid Films, 2003, 445(1): 59-62.

[13] 江剑平. 半导体激光器[M]. 北京: 电子工业出版社, 2000: 87-90.

    Jiang Jianping. Semiconductor Lasers[M]. Beijing: Publishing House of Electronics Industry, 2000: 87-90.

崔碧峰, 程瑾, 郝帅, 李彩芳, 王豪杰. 不同应力增透膜对半导体激光器性能的影响[J]. 半导体光电, 2020, 41(1): 77. CUI Bifeng, CHENG Jin, HAO Shuai, LI Caifang, WANG Haojie. Effect of Different Facet Coating Stress on The Performance of Laser Diodes[J]. Semiconductor Optoelectronics, 2020, 41(1): 77.

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