真空紫外波段铝反射膜制备

为制备出在130~210 nm波段具有良好光谱性能的铝反射膜，优化设计了铝反射镜中铝层和保护层氟化镁的厚度，理论确定铝层和氟化镁保护层最佳厚度分别为80 nm和33 nm。采用热舟蒸发工艺，在BK7基片上制备了Al反射膜样品，获得了130~210 nm波长范围内反射率均大于80%的金属铝膜。研究了铝层沉积速率和紫外辐照处理对薄膜性能的影响，并考察了铝膜光谱性能的时效性。结果表明铝层沉积速率越快，制备的铝膜反射率越高；合理地存放铝膜元件，可以长时间内保持铝膜的光谱性能。适当的紫外辐照处理能进一步提高铝膜在真空紫外波段的反射率。

Abstract

To prepare aluminium coating with high performance in the spectral range of 130~210 nm, the thicknesses of Al and protective MgF2 layers are theoretically optimized and the optimum thicknesses are determined to be approximately 80 nm and 33 nm, respectively. Experimentally, MgF2 protected Al coating is prepared on a BK7 substrate using thermal-boat evaporation. The reflectance of the prepared Al coating is measured to be higher than 80% in the spectral range of 130~210 nm. The effects of deposition rate of Al and UV irradiation treatment on the spectral performance of the Al coating are studied. Aging effect is also experimentally investigated. The results show that the higer deposition rate of Al, the higher reflectance of the mirror. Correct storage method can maintain the spectral performance of the Al reflective film over time. Proper UV irradiation treatment can also enhance the reflectance of Al coating in the vacuum ultraviolet spectral range.

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