中国激光, 2020, 47 (5): 0502009, 网络出版: 2020-05-12
玻璃表面嵌入式亚微米金属线的制备 
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Fabrication of Embedded Submicron Metal Lines on Glass Surfaces
图 & 表
图 1. 在石英玻璃表面制备嵌入式亚微米金属线。(a)制备流程的三维示意图;(b)制备流程的截面示意图; (c)连续流化学镀实验装置示意图
Fig. 1. Fabrication of embedded submicron metal lines on fused silica surfaces. (a) Three-dimensional schematic of fabrication procedure; (b) cross-sectional schematic of fabrication procedure; (c) a schematic of experimental setup for continuous-flow electroless plating
图 2. 不同脉冲能量激光烧蚀凹槽及机械抛光后金属线的光学显微图
Fig. 2. Optical micrographs of grooves ablated by laser with different pulse energies and metal lines after mechanical polishing
图 3. 脉冲能量与烧蚀凹槽线宽、机械抛光后金属线宽的关系
Fig. 3. Pulse energies versus linewidths of laser-ablated grooves and metal lines after mechanical polishing
图 4. 连续流化学镀沉积金属银微结构在热处理前后的SEM图。(a)(b)热处理前;(c)(d)热处理后
Fig. 4. SEM images of silver microstructures deposited by continuous-flow electroless plating before and after thermal treatment. (a)(b) Before thermal treatment; (c)(d) after thermal treatment
余浩锋, 徐剑, 张傲东, 程亚. 玻璃表面嵌入式亚微米金属线的制备[J]. 中国激光, 2020, 47(5): 0502009. Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009.
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