中国激光, 2002, 29 (3): 236, 网络出版: 2006-08-08   

软X射线多层膜反射镜界面粗糙度的一种估算方法

A Method of Evaluating the Roughness of a Co/C Multi-layer Film
作者单位
大连理工大学电子与信息工程学院,辽宁大连,116024
摘要
介绍了描述单个非理想粗糙界面散射的D. G. Stearns法,它适用于软X射线短波段区域.将这种方法应用到多层膜结构,并采用它的数学模型来描述软X射线短波段区域(1~10 nm)多层膜界面粗糙度.在此理论下,对波长为4.77 nm的Co/C多层膜反射镜界面粗糙度进行了分析,估算出该多层镜界面间均方根粗糙度为0.7 nm.
Abstract
Stearns' scattering method is introduced in this paper, which describes the scattering of a single non-ideal interface and is applicable for soft X-ray short wavelength region. It is then extended to multi-layer structure and uses a mathematical modal from Stearns' method to describing the multi-layer interface roughness at soft X-ray short wavelength region (1~10nm). Under the framework of this theory, the interface roughness of a Co/C multi-layer mirror with the wavelength of 4.77 nm is analyzed. The root-mean-square roughness of the multi-layer interface of the mirror is 0.7 nm.
参考文献

[1] . A. Back, R. L. Kauffman, P. M. Bell et al.. Charcterization of Nova plasmas using an x-ray spectrometer with temporal and spatial resolution[J]. Rev. Sci. Instrum., 1995, 66(1): 764-766.

[2] . L. Shealy, R. B. Hoover, T. W. Barbee, Jr. et al.. Design and analysis of a Schwarzschils imaging multilayer x-ray microscope[J]. Opt. Eng., 1990, 29(7): 721-727.

[3] . Sayre. Potential operating region for ultrasoft x-ray microscopy of biological materials[J]. Science, 1977, 196(4296): 1339-1340.

[4] . B. C. Walker, Jr., J. F. Lindblom, J. G. Timoth et al.. The ultra high resolution XUV spectroheliograph[J]. Opt. Eng., 1990, 29(7): 698-710.

[5] M. Born. Principles of Optics [M]. New York: Pergamon, 3rd, 1965

[6] . Vidal, P. Vincent. Metallic multilayers for x-ray using classical thin-film theory[J]. Appl. Opt., 1984, 23(11): 1794-1801.

[7] J. M. Eastman. In Physics of Thin Films, Advances in Research and Development [M]. Edited by F. Hass, M. H. Francombe. New York: Academic Press, Vol.10, 1978

[8] . G. Sterns. The scattering of x rays from nonideal multiplayer structures[J]. J. Appl. Phys., 1989, 65(2): 491-506.

[9] . M. Eastman, P. Baumeister. The microstructure of polished optical surfaces[J]. Opt. Comm., 1974, 12(4): 418-420.

宋利民, 胡家升. 软X射线多层膜反射镜界面粗糙度的一种估算方法[J]. 中国激光, 2002, 29(3): 236. 宋利民, 胡家升. A Method of Evaluating the Roughness of a Co/C Multi-layer Film[J]. Chinese Journal of Lasers, 2002, 29(3): 236.

本文已被 3 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!