InAs/GaSb II类超晶格台面的 ICP 刻蚀研究
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许佳佳, 黄敏, 徐庆庆, 徐志成, 王芳芳, 白治中, 周易, 陈建新, 何力. InAs/GaSb II类超晶格台面的 ICP 刻蚀研究[J]. 红外与毫米波学报, 2019, 38(2): 02171. XU Jia-Jia, HUANG Min, XU Qing-Qing, XU Zhi-Cheng, WANG Fang-Fang, BAI Zhi-Zhong, ZHOU Yi, CHEN Jian-Xin, HE Li. Study on ICP dry etching of type II InAs/GaSb superlattices infrared focal plane arrays[J]. Journal of Infrared and Millimeter Waves, 2019, 38(2): 02171.