一种评价CCOS抛光工艺误差抑制能力的方法

王佳; 范斌; 万勇建; 施春燕; 卓彬

光子学报, 2014, 43 (7): 0722002, 网络出版: 2014-08-18

一种评价CCOS抛光工艺误差抑制能力的方法

A Method to Evaluate the Error Restraint Ability of CCOS Process

论文大纲

王佳 ^1,2,*范斌 ¹万勇建 ¹施春燕 ¹卓彬 ¹

作者单位

¹ 中国科学院光电技术研究所,成都 610209

² 中国科学院大学,北京 100049

摘要

结合光学加工中材料去除的卷积模型和功率谱密度函数,建立了描述CCOS抛光工艺抑制不同频段误差能力的数学模型——平滑谱函数.利用Rigid Conformal磨盘抛光620 mm口径微晶平面玻璃,通过计算平滑谱函数曲线,将CCOS抛光工艺抑制不同频段误差的能力表示为归一化且无量纲的频谱曲线.计算结果表明平滑谱函数曲线能以数值大小评价CCOS抛光工艺对不同频率误差的抑制能力.

Abstract

Base on the convolution model of material removal and power spectral density function in optical manufacturing, a mathematical model named smoothing spectral function was established. A Zerodur plate mirror with diameter of 620 mm was polished using Rigid Conformal tool. By calculating the smoothing spectral curve, the error restraint ability of polishing process can be expressed as a normalized and nondimensional spectral curve. The calculated result indicates that the error restraint ability of polishing process can be evaluated by the value of smoothing spectral function curve.

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王佳, 范斌, 万勇建, 施春燕, 卓彬. 一种评价CCOS抛光工艺误差抑制能力的方法[J]. 光子学报, 2014, 43(7): 0722002. WANG Jia, FAN Bin, WAN Yongjian, SHI Chunyan, ZHUO Bin. A Method to Evaluate the Error Restraint Ability of CCOS Process[J]. ACTA PHOTONICA SINICA, 2014, 43(7): 0722002.

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