新型悬丝约束支撑微纳测头的变刚度特性分析
李保坤, 刘向阳, 杨洪涛, 吴耀东. 新型悬丝约束支撑微纳测头的变刚度特性分析[J]. 光学 精密工程, 2019, 27(2): 402.
LI Bao-kun, LIU Xiang-yang, YANG Hong-tao, WU Yao-dong. Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension[J]. Optics and Precision Engineering, 2019, 27(2): 402.
[1] HUANG Q, WU K, WANG C, et al.. Development of an abbe error free micro coordinate measuring machine [J]. Applied Sciences, 2016, 6(4): 97.
[2] 陈贺, 陈晓怀, 王珊, 等. 微纳米测量机测头结构的参数设计及分析 [J]. 计量学报, 2013, 34(5): 401-405.
CHEN H, CHEN X H, WANG SH, et al.. The parameters design and analysis of micro-nano CMM Probe [J]. Acta Metrologica Sinica, 2013, 34(5): 401-405. (in Chinese)
[3] 陈晓怀, 陈贺, 王珊, 等. 微纳测量机测头弹性结构的参数设计 [J]. 光学 精密工程, 2013, 21(10): 2587-2593.
[4] WECKENMANN A, PEGGS G, HOFFMANN J. Probing systems for dimensional micro-and nano-metrology [J]. Measurement Science & Technology, 2006, 17(3): 504-509.
[5] KHALID A, PETER K, SIMON L.et al.. Performance assement of a new variable stiffness probing system for micro-CMMs [J]. Sensors, 2016, 16(4): 492.
[6] HE M, LIU R, LI Y, et al.. Tactile probing system based on micro-fabricated capacitive sensor [J]. Sensors & Actuators A Physical, 2013, 194: 128-134.
[7] BONELLO P, BRENNAN M J, ELLIOTT S J, et al.. Designs for an adaptive tuned vibration absorber with variable shape stiffness element [J]. Proceedings Mathematical Physical & Engineering Sciences, 2005, 461(2064): 3955-3976.
[8] CHALLA V R, PRASAD M, SHI Y, et al.. A vibration energy harvesting device with bidirectional resonance frequency tunability [J]. Smart Materials & Structures, 2008, 17(1): 15010-15035.
[9] FAN K C, CHENG F, PAN W T, et al.. Analysis of the contact probe mechanism for micro-coordinate measuring machines [J]. Optoelectronics Instrumentation & Data Processing, 2010, 46(4): 340-346.
[10] ALBLALAIHID K, KINNELL P, LAWES S. Fabrication and characterisation of a novel smart suspension for micro-CMM probes [J]. Sensors & Actuators A Physical, 2015, 232: 368-375.
[11] 胡俊峰, 陈星星. 具有零刚度特性的微动平 台优化设计 [J]. 光学 精密工程, 2018, 26 (6): 1430-1440.
[12] HOWELL L L, MAGLEBY S P, OLSEN B M.Handbook of Compliant Mechanisms [M]. New York: John Wiley & Sons, 2013.
[13] 胡俊峰, 徐贵阳, 郝亚洲. 基于响应面法的微操作平台多目标优化 [J]. 光学 精密工程, 2015, 23(4): 1096-1104.
[14] 孙玉琼. 面向压电驱动纳米定位平台的自抗扰运动控制 [D]. 济南: 山东大学, 2016.
SUN Y Q.Active Disturbance Rejection Control for Piezo-driven Nanopositioning Stage [D]. Jinan: Shandong University, 2016. (in Chinese)
[15] 卢倩, 黄卫清, 孙梦馨. 基于柔度比优化设计杠杆式柔性铰链放大机构 [J]. 光学 精密工程, 2016, 24(1): 102-111.
[16] ALBLALAIHID K, LAWES S, KINNELL P. Variable stiffness probing systems for micro-coordinate measuring machines [J]. Precision Engineering, 2016, 43: 262-269.
[17] 余惠娟. 基于谐振模式的三维纳米测头触发方法研究 [D]. 合肥: 合肥工业大学, 2015.
YU H J.Research on the Trigger Mechanism of a 3D Resonant Nano Probe [D]. Hefei: Hefei University of Technology, 2015. (in Chinese)
[18] PRIL W. Development of high precision mechanical probes for coordinate measuring machines [J]. Technische Universiteitndhoven, 2002, 25: 100-102.
李保坤, 刘向阳, 杨洪涛, 吴耀东. 新型悬丝约束支撑微纳测头的变刚度特性分析[J]. 光学 精密工程, 2019, 27(2): 402. LI Bao-kun, LIU Xiang-yang, YANG Hong-tao, WU Yao-dong. Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension[J]. Optics and Precision Engineering, 2019, 27(2): 402.