光学 精密工程, 2019, 27 (2): 402, 网络出版: 2019-04-02
新型悬丝约束支撑微纳测头的变刚度特性分析
Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension
补充材料
李保坤, 刘向阳, 杨洪涛, 吴耀东. 新型悬丝约束支撑微纳测头的变刚度特性分析[J]. 光学 精密工程, 2019, 27(2): 402. LI Bao-kun, LIU Xiang-yang, YANG Hong-tao, WU Yao-dong. Variable stiffness characteristic analysis of a novel micro-nano probe with wire constraint suspension[J]. Optics and Precision Engineering, 2019, 27(2): 402.