S波段窄带带通体声波滤波器设计

针对无人机测控应用设计了一种S波段窄带带通体声波(BAW)滤波器，其技术指标为：中心频率2.46 GHz，带宽41 MHz，带内插损大于-3 dB，带内纹波小于1 dB，带外抑制小于-40 dB@2.385 GHz和2.506 GHz。采用Mason模型设计了BAW滤波器中各薄膜体声波谐振器(FBAR)的叠层结构；使用变迹法设计了各FBAR(电极)的形状；采用一种自行开发的自动布局方法得到紧凑的BAW滤波器布局；建立了BAW滤波器的声-电磁协同仿真模型，通过这种高保真的多物理场仿真方法对设计结果进行了性能验证。该设计流程是通用的，并且有两个特点：采用声-电磁协同仿真方法对设计阶段的BAW滤波器进行最终性能检验，可以及早发现并拒绝1D Mason模型过于乐观的设计；滤波器布局设计中采用了一种新的自动化布局方法，大大简化了在此阶段的反复尝试工作，也为声-电磁协同仿真模型输出了必需的面内结构信息。

Abstract

An S band narrowband bandpass filter bulk acoustic wave(BAW)with center frequency 2.460 GHz, bandwidth 41 MHz, band insertion loss -1.154 dB, passband ripple 0.9 dB, out of band rejection about -42.5 dB@2.385 GHz and -45.5 dB@2.506 GHz was designed for potential UAV measurement and control applications. According to the design specifications, each FBAR stack was designed in BAW filter by using Mason model, each FBAR’s shape was designed with the method of apodizied electrode. The acoustic-electromagnetic co-simulation model was built to validate the performance of the designed BAW filter. The presented design procedure is a common one, and it has two characteristics: (1) an acoustic-electromagnetic(A&EM) co-simulation method is used for the final BAW filter performance validation in the design stage, thus ensures over-optimistic designs by the bare 1D Mason model are found and rejected in time;(2) An in-house developed auto-layout method is used to get compact BAW filter layout, which simplifies iterative error-and-try work here and outputs necessary in-plane geometry information to the A&EM co-simulation model.

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高杨, 赵坤丽, 韩超. S波段窄带带通体声波滤波器设计[J]. 强激光与粒子束, 2017, 29(11): 114101. Gao Yang, Zhao Kunli, Han Chao. Design of S-band narrow-band bandpass bulk acoustic wave filter[J]. High Power Laser and Particle Beams, 2017, 29(11): 114101.

S波段窄带带通体声波滤波器设计

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