强激光与粒子束, 2012, 24 (1): 115, 网络出版: 2012-02-14   

适用于ICF靶夹持的多用微夹持器

Multi-purpose microgripper for ICF targets
作者单位
中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900
摘要
针对惯性约束聚变靶零件的特点和靶装配应用环境, 研制了一种多用微夹持器。该微夹持器以压电陶瓷驱动柔性钳体, 集成张合量和夹持力控制功能, 可更换各种形状夹口和调整夹口初始开口距离, 以适应多种靶零件的夹持。利用有限元分析方法对钳体柔性机构进行了优化设计。通过检测钳体张合时不同部位柔性铰链的应变量, 实现了张合量和夹持力的独立控制, 并对张合量和夹持力进行了精确标定。实验结果表明:微夹持器张合量达到1 320 μm, 其控制分辨力为5 μm;夹持力为365.0 mN, 其控制分辨力1.3 mN。
Abstract
A multi-purpose microgripper for ICF targets has been developed based on the characteristic of ICF targets and target-assembly. The microgripper, whose fingers can be changed for different ICF targets, works with flexure hinge and piezoceramics actuator. The flexure hinges of the microgripper are designed and optimized based on the finite element analysis, and the best simulation results are presented. By measuring the strains of the different flexure hinges, the displacement and holding force of the microgripper can be detected independently and they are calibrated precisely. The displacement reaches 1 320 μm and its detection resolution is 5 μm. The holding force is 365.0 mN and its detection resolution is 1.3 mN.
参考文献

[1] 唐永建, 张林, 吴卫东, 等.ICF靶材料和靶制备技术研究进展[J].强激光与粒子束, 2008, 20(11):1773-1786.(Tang Yongjian, Zhang Lin, Wu Weidong, et al. Research progress on ICF target materials and target fabrication technology. High Power Laser and Particle Beams, 2008, 20(11):1773-1786)

[2] Clevy C, Hubert A, Agnus J, et al. A micromanipulation cell including a tool changer[J]. Journal of Micromechanics and Microengi neering, 2005, 15(10):292-301.

[3] Weck M, Peschke C. Equipment technology for flexible and automated micro-assembly[J]. Microsystem Technologies, 2004, 10(3):241-246.

[4] 陈涛, 孙立宁, 陈立国, 等.侧壁压阻式力传感器的研制与标定[J].纳米技术与精密工程, 2010, 8(3):201-205.(Chen Tao, Sun Lining, Chen Liguo, et al. Design and calibration of sidewall piezoresistive force sensor. Nanotechnology and Precision Engineering, 2010, 8(3):201-205)

[5] 孙立宁, 陈涛, 邵兵, 等.具有力感知功能的四臂式MEMS微夹持器研制[J].光学 精密工程, 2009, 17(8):1878-1883.(Sun Lining, Chen Tao, Shao Bing, et al. Design of four-arm MEMS microgripper integrated with force sensor. Optics and Precision Engineering, 2009, 17(8):1878-1883)

[6] 陈立国, 刘柏旭.复合式MEMS微夹持器的研制[J].光学 精密工程, 2009, 17(8):1928-1934.(Chen Liguo, Liu Baixu. Development of hybrid-type MEMS microgripper. Optics and Precision Engineering, 2009, 17(8):1928-1934)

[7] 荣伟彬, 谢晖, 王家畴, 等.一种集成三维微力传感器的微夹持器研制[J].压电与声光, 2007, 29(2):175-178.(Rong Weibin, Xie Hui, Wang Jiachou, et al. Development of a micro-gripper integrating tri-axial force sensor. Piezoelectrics and Acoustooptics, 2007, 29(2):175-178)

[8] 韩江义, 游有鹏, 王化明, 等.一种带力传感的微夹持器设计及试验[J].机器人, 2009, 31(1):67-71.(Han Jiangyi, You Youpeng, Wang Huaming, et al. Design and experimentation of a micro-gripper with force sensing. Robot, 2009, 31(1):67-71)

[9] 叶鑫, 张之敬, 孙媛, 等.集成微力检测与反馈的双晶片微夹持器[J].兵工学报, 2009, 30(9):1242-1247.(Ye Xin, Zhang Zhijing, Sun Yuan, et al. A bimorph piezoelectric ceramic microgripper integrating micro-force detecting and feedback. Acta Armamentarii, 2009, 30(9):1242-1247)

[10] 张艺, 徐锡林. 微机械手的传动分析[J].上海交通大学学报, 1999, 33(7):862-864.(Zhang Yi, Xu Xilin. Analysis of transmission of micro robot hand. Journal of Shanghai Jiaotong University, 1999, 33(7):862-864)

[11] Na S K, Zhong Z W. A microgripper using piezoelectric actuation for micro-object manipulation[J]. Sensors and Actuators A, 2007, 133(1):218-224.

[12] 杨国兴, 张宪民, 王华.基于有限元方法的柔性铰链式微夹持器优化设计[J].中国机械工程, 2006, 17(10):1074-1078.(Yang Guoxing, Zhang Xianmin, Wang Hua. Optimal design of flexure hinge micro-gripper actuated by PZT based on FEM. China Mechanical Engineering, 2006, 17(10):1074-1078)

余大海, 吴文荣, 罗敏, 王红莲, 李波. 适用于ICF靶夹持的多用微夹持器[J]. 强激光与粒子束, 2012, 24(1): 115. Yu Dahai, Wu Wenrong, Luo Min, Wang Honglian, Li Bo. Multi-purpose microgripper for ICF targets[J]. High Power Laser and Particle Beams, 2012, 24(1): 115.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!