压电自感知微夹钳
[1] 孙立宁,陈立国,荣伟彬,等.面向微机电系统组装与封装的微操作装备关键技术[J].机械工程学报,2008,44(11):13-19.
SUN L N,CHEN L G,RONG W B,et al..Key techniques of micromanipulation devices for MEMS assembling and packaging[J].Chinese Journal of Mechanical Engineering,2008,44(11):13-19.(in Chinese)
[2] 陈立国,刘柏旭.复合式MEMS微夹持器的研制[J].光学精密工程,2009,17(8):1928-1934.
[3] 郝永平,董福禄,张嘉易,等.基于MEMS机构装配的微夹持器研究[J].中国机械工程,2014,25(5):596-601.
HAO Y P,DONG F L,ZHANG J Y,et al..Study on micro-gripper on MEMS mechanism assembly[J].China Mechanical Engineering,2014,25(5):596-601.(in Chinese)
[4] 蔡建华,黄心汉,吕遐东,等.一种集成微力检测的压电式微夹钳[J].机器人,2006,28(1):59-64.
CAI J H,HUANG X H,LU X D,et al..A micro-force sensing integrated piezoelectric microgripper[J].Robot,2006,28(1):59-64.(in Chinese)
[5] XU Q.A new compliant microgripper with integrated position and force sensing[C].Advanced Intelligent Mechatronics (AIM),2013 IEEE/ASME International Conference on,IEEE,2013:591-596.
[6] 余大海,吴文荣,罗敏,等.基于有限元分析的ICF靶半自动装配系统的微夹钳设计[J].传感器与微系统,2011,30(4):120-123.
YU D H,LUO W R,WU M,et al..Design of the micro-gripper used for semi-automatic assembly system of ICF targets based on finite element analysis[J].Transducer and Microsystem Technologies,2011,30(4):120-123.(in Chinese)
[7] 吴俊杰,李源,李东升,等.MEMS电容式三维微触觉侧头设计及校准[J].光学精密工程,2013,20(12):3087-3094.
WU J J,LI Y,LI D SH,et al..Design and calibration of 3D micro tactile probe based on MEMS capacitance sensor[J].Opt.Precision Eng.,2013,20(12):3087-3094.(in Chinese)
[8] RAKOTONDRABE M,IVAN I A.Development and force/position control of a new hybrid thermo-piezoelectric microgripper dedicated to micromanipulation tasks[J].Automation Science and Engineering,IEEE Transactions on,2011,8(4):824-834.
[9] 席文明,钟辉.电磁力驱动的微夹持技术[J].纳米技术与精密工程,2008,6(3):195-198.
XI W M,ZHONG H.Micro-tweezer technology driven by electromagnetic force[J].Nanotechnology and Precision Engineering,2008,6(3):195-198.(in Chinese)
[10] KIM D H,KIM B,KANG H.Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation[J].Microsystem Technologies,2004,10:275-280.
[11] ZHOU Y,NELSON B J.The effect of material properties and gripping force on micrograsping[C].Proceedings of the 2000 IEEE National Conference on Robotics and Automation,2002:1115-1120.
[12] 赵学增,周法权,李宁,等.一种消除AFM中悬臂梁横向扭转串扰误差的修正技术[J].纳米技术与精密工程,2011,9(2):121-126.
ZHAO X Z,ZHOU F Q,LI N,et al..Correction of cross-talk caused by torsion of cantilever in AFM[J].Nanotechnology and Precision Engineering,2011,9(2):121-126.(in Chinese)
[13] NELSON B J,ZHOU Y,VIKRAMADITYA B.Sensor-based microassembly of hybrid MEMS devices[J].IEEE Communications Magazine,1998,18:35-45.
[14] SMITS JAN G,WSH CHOI.The constituent equations of piezoelectric heterogeneous bimorphs[J].IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,1991,38(3):256-270.
[15] 邱磊.基于积分电荷的压电自感知微夹钳研究[D].宁波:宁波大学,2012.
QIU L.Research on Piezoelectric Self-sensing Micro-gripper Based on Integrator[D].Ningbo:Ningbo University,2012.(in Chinese)
崔玉国, 郑军辉, 马剑强, 蔡成波. 压电自感知微夹钳[J]. 光学 精密工程, 2015, 23(7): 1996. CUI Yu-guo, ZHENG Jun-hui, MA Jian-qiang, CAI Cheng-bo. Self-sensing piezoelectric micro-gripper[J]. Optics and Precision Engineering, 2015, 23(7): 1996.
PDF全文
