激光与光电子学进展, 2019, 56 (23): 231404, 网络出版: 2019-11-27 复制并引用该论文  本文已被引 3 次  被引通知

图 & 表

图 1. 激光铣削实验系统及激光铣削原理示意图。(a)实验系统;(b)铣削原理示意图

Fig. 1. Experimental system of laser milling and principle of laser milling. (a) Experimental system; (b) milling schematic

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图 2. 工艺参数对铣削质量的交互式影响。(a)对表面粗糙度的影响;(b)对铣削深度的影响

Fig. 2. Interactive effects of process parameters on milling quality. (a) Effect on surface roughness; (b) effect on milling depth

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图 3. 预测值与实际值的对比。(a)表面粗糙度;(b)铣削深度

Fig. 3. Comparison of predicted and actual values. (a) Surface roughness; (b) milling depth

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图 4. 搭接率对铣削质量的灵敏度分析结果(激光功率为30 W,铣削次数为3,重复频率为40 kHz)

Fig. 4. Analysis results of sensitivity of overlap rate to milling quality (laser power is 30 W, milling times is 3, and laser repetition rate is 40 kHz)

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图 5. 激光功率对铣削质量的灵敏度分析结果(搭接率为80%,铣削次数为3,重复频率为40 kHz)

Fig. 5. Analysis results of sensitivity of laser power to milling quality (overlap rate is 80%, milling times is 3, and laser frequency is 40 kHz)

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图 6. 铣削次数对铣削质量的灵敏度分析结果(搭接率为80%,激光功率为30 W,重复频率为40 kHz)

Fig. 6. Analysis results of sensitivity of laser milling times to milling quality (overlap rate is 80%, laser power is 30 W, and laser repetition rate is 40 kHz)

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图 7. 重复频率对铣削质量的灵敏度分析结果(搭接率为80%,激光功率为30 W,铣削次数为3)

Fig. 7. Analysis results of sensitivity of laser frequency to milling quality (overlap rate is 80%, laser power is 30 W, and milling times is 3)

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图 8. 多目标优化结果

Fig. 8. Results of multi-objective optimization

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图 9. 表面粗糙度的测量区域

Fig. 9. Measurement area of surface roughness

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图 10. 激光铣削的三维形貌和截面轮廓。(a)三维形貌;(b)截面轮廓(搭接率为90%,激光功率为25.6 W,铣削次数为5,重复频率为50 kHz)

Fig. 10. Three-dimensional topography and sectional profile after laser milling. (a) Three-dimensional topography; (b) sectional profile (overlap rate is 90%, laser power is 25.6 W, milling times is 5, and laser repetition rate is 50 kHz)

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图 11. 激光铣削前后陶瓷表面的微观组织。(a)初始表面与铣削表面;(b)初始表面放大图;(c)铣削表面放大图(搭接率为90%,激光功率为25.6 W,铣削次数为5,重复频率为50 kHz)

Fig. 11. Microstructures of ceramic surface before and after laser milling. (a) Initial surface and milled surface; (b) partial enlargement of initial surface; (c) partial enlargement of milled surface (overlap rate is 90%, laser power is 25.6 W, milling times is 5, and laser repetition rate is 50 kHz).

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表 1工艺参数及其取值范围

Table1. Process parameters and their value ranges

Parameter Notation Unit Level -2 -1 0 1 2 Overlap rate O % 70 75 80 85 90 Laser power P W 20 25 30 35 40 Times N - 1 2 3 4 5 Repetition frequency F kHz 30 35 40 45 50

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表 2实验设计矩阵及结果

Table2. Experimental design matrix and results

No. O /% P /W N F /kHz Ra /μm M /μm 1 85 35 2 35 15.208 46.515 2 80 30 3 40 9.890 47.879 3 80 30 3 30 8.325 41.299 4 80 30 3 40 9.890 47.879 5 85 35 4 35 13.537 80.920 6 80 30 1 40 8.115 26.826 7 80 20 3 40 6.265 25.588 8 80 30 3 40 9.890 47.879 9 85 25 2 45 10.025 45.272 10 80 30 3 50 10.297 61.911 11 80 30 5 40 12.984 77.373 12 85 25 4 45 9.782 75.285 13 75 25 4 35 6.726 26.160 14 85 25 2 35 10.006 44.521 15 80 30 3 40 9.890 47.879 16 75 25 2 45 7.828 27.382 17 90 30 3 40 15.198 72.113 18 75 25 4 45 8.625 50.697 19 80 30 3 40 9.890 47.879 20 85 35 2 45 13.171 48.069 21 80 40 3 40 11.582 58.944 22 85 35 4 45 12.632 88.637 23 85 25 4 35 9.425 59.550 24 75 35 2 45 9.032 33.958 25 70 30 3 40 7.361 23.022 26 75 35 4 45 10.482 62.510 27 75 35 4 35 10.125 49.719 28 75 35 2 35 6.871 28.622 29 75 25 2 35 5.987 22.584 30 80 30 3 40 9.890 47.879

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表 3响应面模型的统计学评价

Table3. Statistical evaluation of response surface model

Parameter Number of data points Fitting degree Adequate precision p-value Model of surface roughness 30 0.9404 16.855 <0.0001 Model of milling depth 30 0.9905 41.265 <0.0001

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许兆美, 孟宪凯, 屈彦荣, 朱为国, 郭召恒. 纳秒脉冲激光铣削Al₂O₃陶瓷工艺参数的优化[J]. 激光与光电子学进展, 2019, 56(23): 231404. Zhaomei Xu, Xiankai Meng, Yanrong Qu, Weiguo Zhu, Zhaoheng Guo. Process Parameter Optimization of Al₂O₃ Ceramics Milled with Nanosecond Pulsed Laser[J]. Laser & Optoelectronics Progress, 2019, 56(23): 231404.