基于彩色相机颜色转换算法的彩色共聚焦测量方法 
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Chromatic Confocal Measurement Method Using Color Camera and Color Conversion Algorithm
华侨大学机电及自动化学院, 福建 厦门 361021
图 & 表
图 1. 光谱编码技术原理图
Fig. 1. Principle of spectral coding technology
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图 2. 彩色共聚焦测量方法原理图
Fig. 2. Principle of chromatic confocal measurement method
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图 3. 样品位于不同高度时彩色相机接受到的图像
Fig. 3. Images received by color camera when sample is at different heights
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图 4. 颜色转换算法的研究思路
Fig. 4. Research idea of color conversion algorithm
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图 5. RGB颜色空间与HSI颜色空间。(a) RGB;(b) HSI
Fig. 5. RGB color space and HSI color space. (a) RGB; (b) HSI
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图 6. 彩色共聚焦测量系统装置图
Fig. 6. Experimental setup of chromatic confocal measurement system
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图 7. 标定实验结果及拟合结果。 (a)标定;(b)线性拟合
Fig. 7. Results of calibration experiment and linear fitting. (a) Calibration; (b) linear fitting
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图 8. 量块台阶实物图
Fig. 8. Photograph of measuring block step
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图 9. 台阶实验结果图
Fig. 9. Results of step experiment
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图 10. 一元硬币实物图
Fig. 10. Photograph of one-yuan coin
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图 11. “元”字三维重构结果
Fig. 11. Three-dimensional reconstruction result of “yuan” character
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图 12. 误差修正后“元”字三维重构结果
Fig. 12. Three-dimensional reconstruction result of “yuan” character after error correction
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图 13. 误差修正后“1”字三维重构结果
Fig. 13. Three-dimensional reconstruction result of “1” character after error correction
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表 1不同位置时颜色转换结果
Table1. Results of color conversion in different positions
| Axial height /μm | Hue parameter | Axial height /μm | Hue parameter |
|---|
| 600 | 227.0172 | 1200 | 147.6741 | | 700 | 216.8681 | 1300 | 132.2257 | | 800 | 203.6879 | 1400 | 115.4890 | | 900 | 190.0995 | 1500 | 97.9931 | | 1000 | 173.7393 | 1600 | 83.8637 | | 1100 | 161.7365 | 1700 | 72.2192 |
|
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表 2彩色相机台阶实验数据及台阶高度计算结果
Table2. Data of step experiment with color camera and calculation results of step height
| Experiment number | H value of 1.3 mm gauge block's surface | H value of 1.4 mm gauge block's surface | Difference of H | Height difference /μm |
|---|
| 1 | 89.4441 | 103.8445 | 14.4004 | 99.2447 | | 2 | 89.9892 | 103.9810 | 13.9918 | 96.4285 | | 3 | 89.0367 | 103.3818 | 14.3451 | 98.8633 | | 4 | 89.8664 | 105.0568 | 15.1904 | 104.6892 | | 5 | 89.2076 | 104.1633 | 14.9557 | 103.0717 | | 6 | 90.1667 | 104.1286 | 13.9619 | 96.2225 | | Average value | 89.6185 | 104.0927 | 14.4742 | 99.7534 | | Relative error | 0.25% |
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表 3光谱仪台阶实验数据及台阶高度计算结果
Table3. Data of step experiment with spectrometer and calculation results of step height
| Experiment number | Wavelength of 1.3 mm gauge block's surface /nm | Wavelength of 1.4 mm gauge block's surface /nm | Difference of wavelength /nm | Height difference /μm |
|---|
| 1 | 584.8549 | 583.0764 | 1.7785 | 100.4802 | | 2 | 584.8486 | 583.0587 | 1.7899 | 101.1243 | | 3 | 584.8429 | 583.0780 | 1.7649 | 99.7119 | | 4 | 584.8594 | 583.0513 | 1.8081 | 102.1525 | | 5 | 584.8355 | 583.0501 | 1.7854 | 100.8701 | | 6 | 584.8608 | 583.0691 | 1.7917 | 101.2260 | | 7 | 584.8470 | 583.1040 | 1.7430 | 98.4746 | | 8 | 584.8480 | 583.1004 | 1.7476 | 98.7345 | | 9 | 584.8337 | 583.0649 | 1.7688 | 99.9322 | | 10 | 584.8454 | 583.1053 | 1.7401 | 98.3107 | | Average value | 584.8476 | 583.0758 | 1.7718 | 100.1017 | | Relative error | 0.10% |
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张昆, 余卿, 邵尊桂, 张一, 程方, 傅师伟. 基于彩色相机颜色转换算法的彩色共聚焦测量方法[J]. 光学学报, 2019, 39(12): 1212001. Kun Zhang, Qing Yu, Zungui Shao, Yi Zhang, Fang Cheng, Shiwei Fu. Chromatic Confocal Measurement Method Using Color Camera and Color Conversion Algorithm[J]. Acta Optica Sinica, 2019, 39(12): 1212001.
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