光学学报, 2018, 38 (3): 0328003, 网络出版: 2018-04-02 复制并引用该论文  本文已被引 2 次  被引通知

图 & 表

图 1. 典型一维PC纳米束腔的结构及场图。(a)介质模腔[8];(b)空气模腔[9];(c)槽结构腔[10]

Fig. 1. Schematics and electric field distributions of several typical 1D PC nanobeam cavities. (a) Dielectric-mode cavity[8]; (b) air-mode cavity[9]; (c) slot-based cavity[10]

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图 2. 介质模纳米束腔的能带示意图[8]

Fig. 2. Energy band diagram of dielectric-mode nanobeam cavity[8]

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图 3. 空气模纳米束腔的能带示意图[8]

Fig. 3. Energy band diagram of air-mode nanobeam cavity[8]

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图 4. 基于边腔耦合的一维纳米束腔微纳PC传感器。(a)多纳米束传感器复用阵列[61-63];(b)双纳米束腔级联的双参传感器[64]

Fig. 4. 1D nanobeam cavity PC sensors based on side-cavity-coupling. (a) Multiplexing sensor array with multiple nanobeams[61-63]; (b) dual-parameter sensor based on double nanobeam cavity cascading[64]

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图 5. 基于多腔多路的一维纳米束PC传感器阵列的设计。(a) 32路并联集成传感器阵列[65];(b)各支路级联额外滤波器[66];(c)直接优化各支路微腔自身的FSR性能[67]

Fig. 5. Design of 1D nanobeam cavity PC sensor array based on multi-cavity and multi-channel. (a) 32-channel parallel integrated sensor array[65]; (b) branch-cascaed additional filters[66]; (c) own FSR performance of each branch after direct optimization[67]

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图 6. 基于多腔单路的二维平板PC传感器阵列的设计。(a)串联式集成的传感器阵列[68-69];(b)~(d)边腔耦合式集成的传感阵列[70-71]

Fig. 6. Designs of 2D PC sensor array based on multi-cavity and single-channel. (a) Series integrated sensor array[68-69]; (b)-(d) side-cavity-coupled integrated sensor array[70-71]

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图 7. 基于多腔多路集成结构的二维平板PC传感器阵列的设计。(a)~(c)双通道传感器阵列[73-74];(d)三通道传感器阵列[75];(e)~(f)四通道传感器阵列[76-77]

Fig. 7. Designs of 2D slab PC sensor array based on multi-cavity and multi-channel. (a)-(c) Dua-channel sensor arrays[73-74]; (d) three-channel sensor arrays[75]; (e)-(f) four-channel sensor arrays[76-77]

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图 8. 基于PC微腔与滤波器级联的传感器阵列的设计。(a)文献[ 78];(b)文献[ 79]

Fig. 8. Design of sensor arrays based on PC cavity and filter cascading. (a) From reference [78]; (b) from reference [79]

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图 9. (a) 64腔集成传感阵列[80];(b)片上多功能传感平台[81]

Fig. 9. (a) 64-cavity integrated sensor array[80]; (b) on-chip multi-functional sensor platform[81]

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表 1提高纳米束腔Q值的实验研究

Table1. Studies for improving Q factor value of nanobeam cavity

Reference Structure Q Research type [3] 256 Experiment [4] 105 Experiment [5] 6.3×107 Experiment [6] 1.49×105 Experiment [7] 7.5×105 Experiment [8] 109 Experiment

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表 10 应用于传感领域的导模谐振二维平板PC结构

Table1. 0 2D slab PC structure with guided-mode resonance applied in sensing field

Reference Structure Q Sensitivity /(nm·RIU-1) Detection limit /RIU Analyte Research type [57] 7.1761×104 902 10-6 Liquid Simulation [58] 1.06×104 >800 1.6×10-7 Liquid Experiment [59] 5.5×103 298 1.3×10-6 Liquid Experiment [60] 1.8×104 94.5 3×10-6 Liquid Experiment

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表 2应用于传感领域的一维PC介质模纳米束腔

Table2. 1D PC dielectric-mode nanobeam cavity applied in sensing field

Reference Structure Q Sensitivity Analyte Research type [11] 3.6×104 386 nm·RIU-1 Glucose solution Experiment [12] 2.7×104 269 nm·RIU-1 Liquid Experiment [13] 106 190 nm·RIU-1 Gas Simulation [14] 104 10-5 Gas Experiment [15] 106 98 nm·RIU-1 Liquid Experiment [16] 1.3×104 428 nm·RIU-1 NaCl solution Experiment [17] 3.5×104 58 nm·RIU-1 Ternary liquid mixture Experiment

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表 3应用于传感领域的一维PC空气模纳米束腔

Table3. 1D PC air-mode nanobeam cavity applied in sensing field

Referece Structure Q Sensitivity /(nm·RIU-1) Analyte Research type [18] 2.5×105 - Nano-particle Experiment [19] 770 461 Liquid Experiment [9] 104 537.8 Liquid Simulation [20] 104 389 Liquid Simulation [21] 105 252 Gas Simulation

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表 4应用于传感领域的一维PC槽结构纳米束腔

Table4. 1D PC slot-based nanobeam cavity applied in sensing field

Reference Structure Q Sensitivity /(nm·RIU-1) Analyte Research type [22] 3×103 700 Sucrose solution Experiment [23] 104 410 NaCl solution Experiment [24] 6.08×106 460 Liquid Simulation [25] 103 234 Gas Experiment [26] 105 851 Gas Simulation [27] 4.5×107 - Polystyrene particles Simulation [28] 7×103 451 Ethanol solution Experiment [10] 107 900 Gas Simulation [29] 1.14×107 451 Liquid Simulation

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表 5应用于传感领域的一维PC表面模缺陷腔

Table5. 1D PC surface-mode cavity applied in sensing field

Reference Structure Q Sensitivity /(nm·RIU-1) Research type [30] 2097 1017.98 Simulation [31] <50 2184 Experiment

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表 6高品质因子的二维平板PC点缺陷腔

Table6. 2D slab PC point-defect cavity with high quality factor

Reference Structure Q Research type [32] 4.5×104 Experiment [33] 105 Simulation [34] 106 Experiment [35] 3×103 Experiment [36] 103 Simulation [37] 9.3×103 Experiment [38] 106 Simulation

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表 7应用于生化传感领域的二维PC点缺陷腔

Table7. 2D PC point-defect cavity applied in biochemical sensing field

Reference Structure Q Sensitivity Analyte Research type [39] about 3×103 - Bio-molecule Simulation [40] 2.676×104 15 ng/mL Biomacro-molecule Experiment [41] 1.4×104 3.35 pg/mL Antibiotic proteins combined with biotin Experiment [42] 2.966×103 131.70 nm/RIU Liquid Simulation [43] - - Biomacro-molecule Simulation [44] - - Biomacro-molecule Experiment

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表 8应用于传感领域的二维PC异质结构微腔

Table8. 2D PC heterostructure cavity applied in sensing field

Reference Structure Q Sensitivity /(nm·RIU-1) Analyte Research type [45] 6×105 - - Experiment [46] 3.82×106-1.01×106 171,360 Gas Simulation [47] 5×104 150 Liquid Experiment [48] 2.6×104 510 Gas Experiment [49] 2.5×104 235 Liquid Experiment

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表 9应用于传感领域的二维PC慢光波导

Table9. 2D PC slow-light waveguide applied in sensing field

Reference Structure Detection limit Analyte Research type [50] 0.2 fg Bovine serum albumin Experiment [51] 10-4 Methane Experiment [52] 10-6 Acetylene Simulation [53] 1.56×10-6 Gas Simulation

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王超, 孙富君, 付中原, 周健, 丁兆祥, 田慧平. 光子晶体微纳传感技术的理论与实验研究进展[J]. 光学学报, 2018, 38(3): 0328003. Wang Chao, Sun Fujun, Fu Zhongyuan, Zhou Jian, Ding Zhaoxiang, Tian Huiping. Research Progresses on Theory and Experiments of Photonic Crystal Micronano Sensing Technology[J]. Acta Optica Sinica, 2018, 38(3): 0328003.