基于激光差动多普勒效应的微机电系统动态测试技术
张涛, 冷长林, 钟莹, 张国雄. 基于激光差动多普勒效应的微机电系统动态测试技术[J]. 光学学报, 2007, 27(1): 63.
张涛, 冷长林, 钟莹, 张国雄. MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect[J]. Acta Optica Sinica, 2007, 27(1): 63.
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张涛, 冷长林, 钟莹, 张国雄. 基于激光差动多普勒效应的微机电系统动态测试技术[J]. 光学学报, 2007, 27(1): 63. 张涛, 冷长林, 钟莹, 张国雄. MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect[J]. Acta Optica Sinica, 2007, 27(1): 63.
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