熔质流动特性对毛化凸点成形的影响 
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Influence of Melt Flow Characteristics on Textured Bump Forming
图 & 表
图 1. 物理模型
Fig. 1. Physical model
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图 2. 计算网格
Fig. 2. Computational grid
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图 3. 不同时刻靶材表面的热力学温度分布
Fig. 3. Temperature distribution of target surface at different time
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图 4. 液态45钢表面张力和表面张力温度系数随温度的变化
Fig. 4. Variations of surface tension and surface tension temperature coefficient of liquid 45 steel with temperature
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图 5. 熔池的流动行为
Fig. 5. Flow behaviors of molten pool
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图 6. 加热过程熔池表面形貌的演变
Fig. 6. Evolution of surface morphology of molten pool during heating process
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图 7. 不同时刻黏度的空间分布
Fig. 7. Spatial distribution of viscosity at different time
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图 8. 冷却过程中表面形貌的变化
Fig. 8. Morphology change in cooling process
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图 9. 实验形貌与仿真形貌的对比
Fig. 9. Comparison between experimental morphology and simulation morphology
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表 145钢的材料属性[3,24]
Table1. Material properties of 45 steel[3,24]
| Parameter | Value |
|---|
| Liquid phase density ρl /(kg·m-3) | 7850 | | Solid phase density ρs /(kg·m-3) | 7850 | | Melting temperature Tm /K | 1788.5 | | Vaporizing temperature Tv /K | 2633.5 | | Latent heat of fusion Lm /(J·kg-1) | 2.717×105 | | Surface tension of pure metal γm /(N·m-1) | 1.943 | | Constant in surface tensiongradient Aγ /(N·m-1·K-1) | 4×10-4 | | Dynamic viscosity of liquid phase μl /(Pa·s) | 5.1×10-3 | | Mushy zone constant Amush | 106 | | Surface excess at saturation Γs /(mol·m-2) | 1.3×10-5 | | Entropy factor k1 | 3.18×10-3 | | Activity of sulfur ai | 0.0072 | | Standard heat of absorption ΔH0 /(J·mol-1) | -1.88×105 | | Coefficient of heat transferh /(W·m-2·K-1) | 10 | | Radiation emissivity ε | 0.7 | | Ambient temperature Ta /K | 293.15 |
|
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表 2不同热力学温度T下45钢的比热容Cp和热导率k[25]
Table2. Specific heat capacity Cp and thermal conductivity k of steel 45 at different temperatures[25]
| T /℃ | 20 | 100 | 300 | 500 | 700 | 755 | 800 | 900 | 1000 |
|---|
| Cp /(J·kg-1·℃) | 472 | 480 | 524 | 615 | 854 | 1064 | 806 | 637 | 602 | | k /(W·m-1·℃) | 47 | 43 | 38 | 34 | 28 | 25 | 26 | 25 | 24 |
|
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表 3边界条件
Table3. Boundary conditions
| Physics | Physical meaning | Number | Boundary condition |
|---|
| Heat transfer | Laser irradiation | 3 | Inward heat flux | | Natural convection | 2,3,4 | Convection heat flux | | Normal stress | 3 | Normal boundary stress | | Tangential stress | 3 | Marangoni effect | | Fluid flow | Wall | 2,4 | No slip | | Axis | 1 | Axisymmetry | | Moving mesh | Fixed boundary | 1,2,4 | Prescribed mesh displacement | | Free deformation | 3 | Prescribed mesh speed |
|
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表 4激光参数
Table4. Laser parameters
| Parameter | Value |
|---|
| Monopulse energy Ep /mJ | 250 | | Pulse width Pw /ms | 0.8 | | Beam size r /μm | 200 | | Absorption coefficient η | 0.39 | | Temperature transition interval ofmelting ΔT /K | 10 |
|
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表 5实验测量得到的宽度和高度
Table5. Width and height measured in experiment
| Number | Height /μm | Width /μm | Number | Height /μm | Width /μm |
|---|
| 1 | 3.39 | 145.6 | 11 | 3.71 | 136.1 | | 2 | 4.39 | 143.7 | 12 | 4.45 | 147.9 | | 3 | 5.56 | 152.2 | 13 | 2.89 | 130.9 | | 4 | 4.40 | 129.5 | 14 | 3.88 | 146.5 | | 5 | 2.03 | 126.7 | 15 | 4.35 | 142.7 | | 6 | 4.61 | 163.9 | 16 | 4.37 | 144.1 | | 7 | 4.24 | 129.9 | 17 | 4.79 | 135.2 | | 8 | 5.25 | 150.3 | 18 | 5.54 | 146.9 | | 9 | 5.49 | 129.0 | 19 | 6.38 | 147.0 | | 10 | 4.05 | 126.2 | 20 | 3.54 | 126.7 |
|
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表 6实验测量结果与模拟结果对比
Table6. Comparison between experimental measurement and numerical simulation results
| Result | Experimental /μm | Simulation /μm | Difference /% |
|---|
| Height | 4.37 | 4.13 | 5.492 | | Width | 144.1 | 172.6 | 16.512 |
|
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符永宏, 黄婷, 叶云霞, 华希俊, 李海波, 钟行涛. 熔质流动特性对毛化凸点成形的影响[J]. 中国激光, 2019, 46(7): 0702005. Yonghong Fu, Ting Huang, Yunxia Ye, Xijun Hua, Haibo Li, Xingtao Zhong. Influence of Melt Flow Characteristics on Textured Bump Forming[J]. Chinese Journal of Lasers, 2019, 46(7): 0702005.
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