压电微动工作台的动态迟滞模型
张栋, 张承进, 魏强. 压电微动工作台的动态迟滞模型[J]. 光学 精密工程, 2009, 17(3): 549.
ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549.
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张栋, 张承进, 魏强. 压电微动工作台的动态迟滞模型[J]. 光学 精密工程, 2009, 17(3): 549. ZHANG Dong, ZHANG Cheng-jin, WEI Qiang. Dynamic hysteresis model of piezopositioning stage[J]. Optics and Precision Engineering, 2009, 17(3): 549.