基于扫描白光干涉法的LCOS芯片像素级相位分析
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屈铭, 郑俊杰, 李敏, 桂聪, 宋五洲. 基于扫描白光干涉法的LCOS芯片像素级相位分析[J]. 光子学报, 2019, 48(9): 0911004. QU Ming, ZHENG Junjie, LI Min, GUI Cong, SONG Wuzhou. Pixellevel Observation of Phase Profile in Liquid Crystal on Silicon Device by White Light Scanning Interferometry[J]. ACTA PHOTONICA SINICA, 2019, 48(9): 0911004.