Intelligent Camera for Surface Defect Inspection

CHENG Wan-sheng; ZHAO Jie; WANG Ke-cheng

半导体光子学与技术, 2007, 13 (1): 33, 网络出版: 2011-08-18

Intelligent Camera for Surface Defect Inspection

CHENG Wan-sheng ¹ZHAO Jie ¹WANG Ke-cheng ²

作者单位

¹ Robotics Institute, Harbin Institute of Technology, Harbin 150080, CHN

² Anshan University of Science and Technology, Anshan 114044, CHN

图 & 表

CHENG Wan-sheng, ZHAO Jie, WANG Ke-cheng. Intelligent Camera for Surface Defect Inspection[J]. 半导体光子学与技术, 2007, 13(1): 33. CHENG Wan-sheng, ZHAO Jie, WANG Ke-cheng. Intelligent Camera for Surface Defect Inspection[J]. Semiconductor Photonics and Technology, 2007, 13(1): 33.