蓝绿激光作用下沉积态Ag11In12Sb51Te26相变薄膜的晶化性能

张广军; 顾冬红; 干福熹

中国激光, 2004, 31 (11): 1351, 网络出版: 2006-06-12

蓝绿激光作用下沉积态Ag₁₁In₁₂Sb₅₁Te₂₆相变薄膜的晶化性能

Properties of Crystallization for As-Deposited Ag₁₁In₁₂Sb₅₁Te₂₆ Phase Change Thin Films Irradiation upon Blue-Green Laser

论文大纲

张广军 ^*顾冬红干福熹

作者单位

中国科学院上海光学精密机械研究所高密度光存储实验室, 上海 201800

薄膜相变薄膜蓝绿激光晶化反射率对比度 thin films phase change films blue-green laser Ag11In12Sb51Te26 Ag11In12Sb51Te26 crystallization reflectivity contrast

摘要

用反射率对比度来衡量晶化程度,分别探讨了脉宽为500 ns,100 ns,60 ns的蓝绿激光(514 nm)作用下沉积态Ag11In12Sb51Te26相变薄膜的晶化性能,表明Ag11In12Sb51Te26相变薄膜在蓝绿激光下可具有较高的晶化速度。对比分析了热致晶化后的Ag11In12Sb51Te26薄膜在514 nm处的反射率对比度,结果表明激光晶化和热致晶化后薄膜的反射率对比度有明显差别,分别为8%和19.2%。

Abstract

The properties of blue-green laser induced crystallization for as-deposited Ag11In12Sb51Te26 phase change thin films irradiation are studied by measuring the reflectivity contrast at 500, 100 and 60 ns pulse duration. The results show that Ag11In12Sb51Te26 phase change thin films irradiated by blue-green laser have high crystallization speed. The reflectivity contrast of thermal treatment Ag11In12Sb51Te26 phase change thin films is also investigated, and the results show that there is a different in the reflectivity contrast, which is 8% and 19.2%, for laser-induced and thermal treatment films, respectively.

参考文献

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张广军, 顾冬红, 干福熹. 蓝绿激光作用下沉积态Ag₁₁In₁₂Sb₅₁Te₂₆相变薄膜的晶化性能[J]. 中国激光, 2004, 31(11): 1351. 张广军, 顾冬红, 干福熹. Properties of Crystallization for As-Deposited Ag₁₁In₁₂Sb₅₁Te₂₆ Phase Change Thin Films Irradiation upon Blue-Green Laser[J]. Chinese Journal of Lasers, 2004, 31(11): 1351.

蓝绿激光作用下沉积态Ag₁₁In₁₂Sb₅₁Te₂₆相变薄膜的晶化性能

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