红外与激光工程, 2018, 47 (12): 1243003, 网络出版: 2019-01-10
表面杂质和节瘤缺陷诱导薄膜元件热熔融损伤
Thermal melting damage of thin film components induced by surface impurities and nodule defects
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余霞, 徐娇, 张彬. 表面杂质和节瘤缺陷诱导薄膜元件热熔融损伤[J]. 红外与激光工程, 2018, 47(12): 1243003. Yu Xia, Xu Jiao, Zhang Bin. Thermal melting damage of thin film components induced by surface impurities and nodule defects[J]. Infrared and Laser Engineering, 2018, 47(12): 1243003.