强激光与粒子束, 2016, 28 (8): 28084002, 网络出版: 2016-07-26  

用α能损法测量薄膜厚度所需真空度的确定方法

A method to determine the vacuum degree while measuring the thickness of thin films using energy loss of α-particles
作者单位
1 四川大学 物理系, 成都 610064
2 中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900
3 兰州大学 第二医院, 兰州 730000
引用该论文

许佳, 徐家云, 马小军, 宋佳玲, 黎刚, 张敏超, 王力. 用α能损法测量薄膜厚度所需真空度的确定方法[J]. 强激光与粒子束, 2016, 28(8): 28084002.

Xu Jia, Xu Jiayun, Ma Xiaojun, Song Jialing, Li Gang, Zhang Minchao, Wang Li. A method to determine the vacuum degree while measuring the thickness of thin films using energy loss of α-particles[J]. High Power Laser and Particle Beams, 2016, 28(8): 28084002.

参考文献

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[3] 王叶,吴丽萍,姚振强.单能电子测厚中最佳取谱方法的研究[J].四川大学学报(自然科学版), 2010, 47(3):559-562.(Wang Ye, Wu Liping, Yao Zhenqiang. Study on choice of the best spectrum unscrambling method in thickness measurements using mono-energetic electrons. Journal of Sichuan University (Natural Science Edition), 2010, 47(3):559-562)

[4] 邵新生.薄膜厚度的α能损法测量和γ谱探测效率的MCNP模拟描述方法研究[D].成都:四川大学, 2007.(Shao Xinsheng. Film thickness of the alpha energy loss measurement and detection efficiency gamma spectrum of MCNP simulation method described. Chengdu: Sichuan University, 2007)

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[10] 杜英辉,胡跃明,周建明.α能损法测厚仪的研制[J].中国原子能科学研究院年报, 2007(1):176-177.(Du Yinghui, Hu Yueming, Zhou Jianming. The development of the thickness measurement by using α-particle energy loss method. Annals of the China Institute of Atomic Energy, 2007(1):176-177)

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许佳, 徐家云, 马小军, 宋佳玲, 黎刚, 张敏超, 王力. 用α能损法测量薄膜厚度所需真空度的确定方法[J]. 强激光与粒子束, 2016, 28(8): 28084002. Xu Jia, Xu Jiayun, Ma Xiaojun, Song Jialing, Li Gang, Zhang Minchao, Wang Li. A method to determine the vacuum degree while measuring the thickness of thin films using energy loss of α-particles[J]. High Power Laser and Particle Beams, 2016, 28(8): 28084002.

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