强激光与粒子束, 2016, 28 (8): 28084002, 网络出版: 2016-07-26
用α能损法测量薄膜厚度所需真空度的确定方法
A method to determine the vacuum degree while measuring the thickness of thin films using energy loss of α-particles
图 & 表
许佳, 徐家云, 马小军, 宋佳玲, 黎刚, 张敏超, 王力. 用α能损法测量薄膜厚度所需真空度的确定方法[J]. 强激光与粒子束, 2016, 28(8): 28084002. Xu Jia, Xu Jiayun, Ma Xiaojun, Song Jialing, Li Gang, Zhang Minchao, Wang Li. A method to determine the vacuum degree while measuring the thickness of thin films using energy loss of α-particles[J]. High Power Laser and Particle Beams, 2016, 28(8): 28084002.