中国激光, 2002, 29 (2): 107, 网络出版: 2006-08-08  

射频激励铜离子激光器阻抗特性实验研究

Experimental Study on Impedance Characteristics of the Cu Ion Laser at RF Discharge Excitation
作者单位
1 深圳大学理学院实验中心,广东深圳,518060
2 深圳大学光电子系,广东深圳,518060
3 德国鲁尔大学电子工程与信息技术系,德国波鸿D-44780
摘要
利用自行研制的传感器和测量装置,通过对射频放电电压电流以及其相位角的测定,结合放电管的等效电路,对射频激励激光器阻抗特性进行研究,得出射频激励激光器等离子体的伏安特性曲线,以及等离子体电阻、容抗与气体压强、放电电流之间的实验曲线.
Abstract
The impedance characteristics of RF discharge CW laser are studied by measuring the current, voltage and phase angle. The V-I characteristic, impedance and capacitance of the RF discharge plasma changing with the gas pressure and current are given.
参考文献

[1] Huang Jianjun, Yu Jianhua, D. Teuner. The probe measuring voltage, current and the phase angle of RF discharges [J]. Instrument Technique and Sensor (仪表技术与传感器), 2000, (11):1~2 (in Chinese)

[2] . A. Sobolewski. Electrical characteristics of argon radio frequency glow discharges in an asymmetric cell[J]. IEEE Trans. Plasma Sci., 1995, 23(6): 1006-1022.

[3] Huang Jianjun, Yu Jianhua, D. Teuner. Measurement of voltage current phase angle and power at RF discharges [J]. Electrical Measurement & Instrumentation (电子测量与仪表), 2000, (9):25~27 (in Chinese)

[4] . -F. Loiseau, B. Held. Impedance matching for optimization of power trancer in a capacitively excited RF plasma reactor[J]. The European Physical Journal: Applied Physics, 1998, 3: 91-95.

黄建军, 余建华, . 射频激励铜离子激光器阻抗特性实验研究[J]. 中国激光, 2002, 29(2): 107. 黄建军, 余建华, D. Teuner. Experimental Study on Impedance Characteristics of the Cu Ion Laser at RF Discharge Excitation[J]. Chinese Journal of Lasers, 2002, 29(2): 107.

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