利用p-偏振双面反射法、原子力显微术及激光损伤实验,对经不同化学清洗的K9平板玻璃基片表面的光学特性进行了综合表征.实验结果表明,经酸洗的玻璃表面,其消光系数明显减小,而光洁度和激光损伤阈值明显提高;通过进一步的碱洗,玻璃表面的光学性能仍可得到一定的改善.另外,随玻璃基片清洗程序的不断深入,p-偏振双面反射法测得的玻璃表面层光学参量的变化趋势,与观测的表面粗糙度及激光损伤阈值的变化趋势一致.

The surface optical performances of K9 glass plate through different chemical cleaning procedures were synthetically characterized by p-polarized reflectance method, atomic force microscopy and laser damage test. The results show that the extinction coefficient of glass surface with acid erosion decreases clearly, and its fineness and laser-induced damage threshold increase accordingly. Further the glass surface optical performances can be improved through alkaline cleaning. In addition, with the development of cleaning program of glass plate, the changing trend of glass surface optical parameters measured by p-polarized reflectance, accord with that of observed surface roughness and damage threshold.