红外与激光工程, 2006, 35 (2): 197, 网络出版: 2006-10-20  

量子阱红外探测器光栅耦合参数的优化

Optimization of grating light coupling parameters for quantum well infrared detectors
作者单位
1 山东大学,信息科学与工程学院,山东,济南,250100
2 山东大学,物理与微电子学院,山东,济南,250100
摘要
基于傅里叶光学的知识,分别对量子阱红外探测器的一维和二维光栅耦合模式进行了研究,得到器件的相对吸收率随波长和光栅周期之比的变化曲线,把此曲线作为优化光栅常数的依据.对于给定峰值波长的探测器,在波长与一维光栅周期之比为1时,吸收率最大;波长与二维光栅周期之比为0.7时,吸收效率最高,结果与已发表的数据相符.此外,还对刻蚀误差的影响进行了讨论,当实际刻蚀的光栅常数与优化的有偏差时,耦合效率降低.
Abstract
参考文献

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连洁, 王青圃, 程兴奎, 陈大明, 张飒飒. 量子阱红外探测器光栅耦合参数的优化[J]. 红外与激光工程, 2006, 35(2): 197. 连洁, 王青圃, 程兴奎, 陈大明, 张飒飒. Optimization of grating light coupling parameters for quantum well infrared detectors[J]. Infrared and Laser Engineering, 2006, 35(2): 197.

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