照明物镜像差对远场衍射波前质量影响的严格矢量分析
[1] K. Otaki, Y Zhua, M. Ishij et al.. Rigorous wave front analysis of the visible-light point diffraction interferometer for EUVL[C]. SPIE, 2004, 5193: 182~190
[2] K. Otaki, T. Yamamoto, Y. Fukuda et al.. Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror[J]. J. Vac. Sci. Technol. B, 2002, 20(1): 295~300
[3] H. Medecki, E. Tejnil, K. A. Goldberg et al.. Phase-shifting point diffraction interferometer[J]. Opt. Lett., 1996, 21(19): 1526~1528
[4] Y. Ichbara. Interferometer[P]. U. S. Patent 5076695, 1991-12-31
[5] G. E. Sommargren. Phase shifting interferometer[P]. U. S. Patent 5933236, 1999-08-03
[6] P. P. Naulleau, K. A. Goldberg, S. H. Lee et al.. Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy[J]. Appl. Opt., 1999, 38(35): 7252~7263
[7] K. Otaki, F. Bonneau, Y. Ichihara. Absolute measurement of spherical surface by point diffraction interferometer[C]. SPIE, 1999, 3740: 602~605
[8] K. Ota, T. Yamamoto, Y. Fukuda et al.. Advanced point diffraction interferometer for EUV aspherical mirrors[C]. SPIE, 2001, 4343: 543~550
[9] K. Ota, T. Yamamoto, Y. Fukuda et al.. Aspherical mirror measurement using a point diffraction interferometer[C]. SPIE, 2002, 4688: 690~694
[10] K. A. Goldberg, P. Naulleau, S. H. Lee et al.. Direct comparison of EUV and visible-light interferometries[C]. SPIE, 1999, 3676: 1~8
[11] 卢增雄, 金春水, 张立超 等. 极紫外三维小孔矢量衍射波面质量分析[J]. 光学学报, 2010, 30(10): 2849~2854
[12] Y. Sekine, A. Suzuki, M. Hasegawa. Wave-front errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B, 2004, 22(1): 104~108
[13] 陈琛, 杨勇英, 王道档 等. 基于时域有限差分法的点衍射波前误差分析[J]. 中国激光, 2011, 38(9): 0908003
[14] 许嘉俊, 邢廷文. 可见光二维小孔矢量衍射分析[J]. 光学学报, 2011, 31(12): 1205003
[15] A. Wong. Rigorous Three-Dimensional Time-Domain Finite-Difference Electromagnetic Simulation[D]. California: University of California at Berkeley,1994. 11~25
[16] J. W. Goodman. 傅里叶光学导论[M]. 秦克诚,刘培森,陈家壁 等 译. 北京:电子工业出版社, 2006. 40~42
J. W. Goodman. Introduction to Fourier Optics[M]. Qing Kechneg, Liu Peisen, Chen Jiabi et al. Transl.. Beijing: Publishing House of Industry Press, 2006. 40~42
[17] D. Malacara, J. M. Carpio-Valadéz. J. J. Sánchez-Mondragón. Wavefront fitting with discrete orthogonal polynomials in a unit radius circle[J]. Opt. Engng., 1990, 29(6): 672~675
[18] D. J. Fischer, J. T. O′Bryan, R. Lopez. Vector formulation for interferogram surface fitting[J]. Appl. Opt., 1993, 32(25): 4738~4743
[19] C. P. Brophy. Effect of intensity error correlation on the computed phase of phase-shifting interferometry[J]. J. Opt. Soc. Am. A, 1990, 7(4): 537~541
[20] Bing Zhao, Y. Surrel. Effect of quantization error on the computed phase of phase-shifting measurements[J]. Appl. Opt., 1997, 36(10): 2070~2075
卢增雄, 金春水, 马冬梅. 照明物镜像差对远场衍射波前质量影响的严格矢量分析[J]. 光学学报, 2012, 32(8): 0812001. Lu Zengxiong, Jin Chunshui, Ma Dongmei. Rigorous Vector Analysis of the Effect of Illumination Objective Lens Aberration on the Quality of Far-Field Diffracted Wave Front[J]. Acta Optica Sinica, 2012, 32(8): 0812001.